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US 9,174,306 B2Granted
Laser processing method for nonlinear crystal substrate
AssigneeDisco Corporation
InventorsHiroshi Morikazu, Yoko Nishino
Life of this patent
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Abstract
A laser processing method for a nonlinear crystal substrate having a plurality of crossing division lines which includes the step of applying a pulsed laser beam to a work surface of the nonlinear crystal substrate along the division lines to thereby form a plurality of laser processed grooves on the work surface along the division lines. The pulse width of the pulsed laser beam is set to 200 ps or less and the repetition frequency of the pulsed laser beam is set to 50 kHz or less.
Claims14
A laser processing method for a nonlinear crystal substrate having a plurality of crossing division lines, comprising:
- a step of applying a pulsed laser beam to a work surface of said nonlinear crystal substrate along said division lines to thereby cut a plurality of laser processed grooves into said work surface along said division lines,
- wherein a pulse width of said pulsed laser beam is set to be greater than zero and less than or equal to 200 ps and a repetition frequency of said pulsed laser beam is set to between 25 kHz and 50 kHz.
Dependencies are inferred from the claim text.