Laser decontamination device

A laser decontamination device for use with a contaminated article, the laser decontamination device comprising:

• a CW laser oscillator configured to output a machining laser beam;
• a scanning device including:
• (i) an XY axis scanner configured to reflectively and planarly scan the machining laser beam with beam reflectors, and (ii) a Z axis scanner configured to adjust a focal distance of the machining laser beam with one of a variable focus lens and a movable lens, the Z axis scanner being disposed nearer to the CW laser oscillator than the XY axis scanner, the scanning device condensing the machining laser beam scanned by the XY axis scanner and the Z axis scanner on a surface of the contaminated article without intervention of any compound lens integrated with a plurality of lenses disposed between the XY axis scanner and the contaminated article;
• and
• a surface shape measuring device configured to measure a surface shape of the contaminated article by an optical means including a laser range finder and the XY axis scanner, wherein
• the Z axis scanner is provided with a focus position controlling section configured to automatically adjust a focus position according to an irradiation position such that a focus of the machining laser beam is oriented on the surface of the contaminated article based on shape data obtained by the surface shape measuring device to cause the laser beam to be three-dimensionally scanned over and irradiated onto the surface of the contaminated article with the focus spot aligned in pinpointing with the surface of the contaminated article to peel or sublimate contaminants off the surface of the contaminated article.