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US 9,174,296 B2Granted
Plasma ignition and sustaining methods and apparatuses
AssigneeLam Research Corporation
InventorsNeil Martin Paul Benjamin, Andreas Fischer
Life of this patent
Estimating the term…
Abstract
An apparatus for generating plasma including a plasma generating vessel and a coil having a coil length and a first set of partially enclosing, longitudinally oriented conductive (PELOC) fingers and a second set of PELOC fingers. The PELOC finger sets are oriented along a longitudinal axis of the vessel with each partially enclosing a periphery of the vessel. The two sets of PELOC fingers are oriented fingertips facing fingertips and separated by an inter-set distance that is less than the coil length.
Claims20
An apparatus for generating plasma, comprising:
- a vessel within which said plasma is generated;
- and a coil configured to receive an RF driver signal to at least sustain said plasma, said coil having a coil length;
- a first spine and a plurality of fingers extending from said first spine and circumferentially spaced apart from each other, each of said plurality of fingers are oriented along a longitudinal axis of said vessel and said plurality of fingers of said first spine and said first spine partially enclose a periphery of said vessel, said plurality of fingers of said first spine being electrically coupled to a first end of said coil;
- and a second spine and a plurality of fingers extending from said second spine and circumferentially spaced apart from each other, each of said plurality of fingers are oriented along said longitudinal axis of said vessel and said plurality of fingers of said second spine and said second spine partially enclose said periphery of said vessel, said plurality of fingers of said second spine being electrically coupled to a second end of said coil, wherein tips of said plurality of fingers of said first spine and second spine are oriented directionally in a direction to face each other and are axially separated along the longitudinal axis by a distance that is less than said coil length;
- wherein the first spine, the second spine and the coil are located exterior to said vessel.
2 more elements
An apparatus for generating plasma, comprising:
- a vessel within which said plasma is generated;
- and a coil configured to receive an RF driver signal to sustain said plasma during operation, said coil having a coil length that has circumferential turns that circle around and outside the vessel;
- a first spine having a plurality of fingers extending from said first spine, each of the plurality of fingers of said first spine being circumferentially spaced apart from each other, and each of said plurality of fingers of said first spine is oriented along a longitudinal axis of said vessel, wherein said plurality of fingers of said first spine and said first spine encircle a periphery of said vessel except for a first gap, said plurality of fingers of said first spine being electrically conductive and coupled to a first end of said coil;
- and a second spine having a plurality of fingers extending from said second spine, each of the plurality of fingers of said second spine being circumferentially spaced apart from each other, and each of said plurality of fingers of said second spine is oriented along the longitudinal axis of said vessel, wherein said plurality of fingers of said second spine and said second spine encircle the periphery of said vessel except for a second gap, said plurality of fingers of said second spine being electrically conductive and coupled to a second end of said coil;
- wherein the first spine and plurality of fingers and the second spine and plurality of fingers are spaced apart by a third gap, the third gap defined by a length between tip ends of the plurality of fingers of the first spine and the second spine that are oriented directionally to face each other along the longitudinal axis, the length being less than said coil length;
- wherein the plurality of fingers of the first spine and the second spine are exterior to said vessel and disposed between the vessel and the coil.
3 more elements
An apparatus for generating a plasma, comprising:
- a vessel for containing said plasma during operation;
- an radio frequency (RF) source;
- a coil coupled to said radio frequency (RF) source, said coil having a coil length that has circumferential turns that circle around and outside the vessel;
- a first spine having a plurality of fingers extending from said first spine, each of the plurality of fingers of said first spine being circumferentially spaced apart from each other, and each of said plurality of fingers of said first spine is oriented along a longitudinal axis of said vessel, wherein said plurality of fingers of said first spine and said first spine encircle a periphery of said vessel except for a first gap, said plurality of fingers of said first spine being electrically conductive and coupled to a first end of said coil;
- and a second spine having a plurality of fingers extending from said second spine, each of the plurality of fingers of said second spine being circumferentially spaced apart from each other, and each of said plurality of fingers of said second spine is oriented along the longitudinal axis of said vessel, wherein said plurality of fingers of said second spine and said second spine encircle the periphery of said vessel except for a second gap, said plurality of fingers of said second spine being electrically conductive and coupled to a second end of said coil;
- wherein the first spine and plurality of fingers and the second spine and plurality of fingers are spaced apart by a third gap, the third gap defined by a length between tips of the plurality of fingers of the first spine and the second spine, the first spine and the second spine being oriented at opposite sides of the tips of the plurality of fingers along the longitudinal axis;
- wherein the tips of the plurality of fingers of the first spine and the second spine are oriented to directionally face each other, the length being less than said coil length;
- wherein the plurality of fingers of the first spine and the second spine are disposed exterior said vessel and between the vessel and the coil.
5 more elements
Dependencies are inferred from the claim text.