Purge nozzle unit, purge apparatus and load port
AssigneeSinfonia Technology Co., Ltd.
InventorsMitsuo Natsume, Atsushi Suzuki
Life of this patent
Estimating the term…
Abstract
A purge nozzle unit 1 includes a nozzle main body 2 including a trunk 41 and a collar section 8 protruding outward from the trunk 41 and a holder 3 including a side wall 31 that is in slidable contact with an outward face of the collar section 8 and a bottom wall 33 having a through hole 32 with which an outward face of the trunk 41 is in slidable contact and is configured such that a vent 30 in communication with the outside is formed in the holder 3 and the nozzle main body 2 is vertically moved relative to the holder 3 by regulating a pressure in a pressure-regulated space S formed between the nozzle main body 2 and the holder 3 and in communication with the vent 30.
Claims5
A purge nozzle unit capable of replacing a gaseous atmosphere in a purge container with purge gas composed of nitrogen or dry air through a port provided on a bottom of the purge container, comprising
- a nozzle main body and a holder,
- the nozzle main body including a trunk that allows the purge gas to pass through and a collar section that protrudes outward from the trunk,
- the holder including a side wall that is in slidable contact with an outward face of the collar section and a bottom wall having a through hole in which the trunk is inserted while an outward face of the trunk is in slidable contact with the through hole,
- wherein the holder has a vent in communication with the outside, the vent formed in at least a part of the holder, and
- the nozzle main body is vertically moved relative to the holder by regulating a pressure in a pressure-regulated space that is formed between the nozzle main body and the holder and communicates with the vent.
Dependencies are inferred from the claim text.