Biaxial linear-motion micro drive apparatus

A biaxial linear-motion micro drive apparatus, comprising:

• a Z-direction sliding base (1);
• a raised mounting base A (14) provided on a center of an upper surface of the Z-direction sliding base (1);
• a Z-direction micro actuator (13) fixedly mounted within the mounting base A (14) and in transmission connection with a Z-direction micro motion platform (11), the Z-direction micro motion platform (11) being fixedly connected with an X-direction sliding base (4) upwardly;
• two Z-direction guide rail strips (2) arranged in parallel on the Z-direction sliding base (1) at both sides of the mounting base A (14);
• two Z-direction guide rail blocks (3) correspondingly provided on one Z-direction guide rail strip (2) at each side, four Z-direction guide rail blocks (3) being fixedly mounted on a lower surface of the X-direction sliding base (4);
• a raised mounting base B (15) provided on a center of an upper surface of the X-direction sliding base (4);
• an X-direction micro actuator (5) fixedly mounted at an inner side of the mounting base B (15) and in transmission connection with an X-direction micro motion platform (6), the X-direction micro motion platform (6) being fixedly connected with an XZ biaxial motion platform (9) upwardly;
• two X-direction guide rail strips (7) arranged on the upper surface of the X-direction sliding base (4) at both sides of the mounting base B (15);
• and
• four X-direction guide rail blocks (8), two of the X-direction guide rail blocks (8) correspondingly provided on each X-direction guide strip (7), with all four X-direction guide rail blocks (8) being fixedly mounted on a lower surface of the XZ biaxial motion platform (19);
• wherein;
• the two X-direction guide rail strips (7) are fixedly mounted at both sides of the X-direction sliding base (4) symmetrically in front and rear and in up and down relative to the X-direction micro actuator (5);
• the two Z-direction guide rail strips (2) are fixedly mounted at both sides of the Z-direction sliding base (1) symmetrically in left and right and in up and down relative to the Z-direction micro actuator (13),
• the X-direction micro motion platform (6) and the mounting base B (15) on the X-direction sliding base (4) are inter-connected by four X-direction flexible hinges (10) mounted symmetrically in front and rear of the X-direction micro motion platform (6) to enable limited movement of the X-direction micro motion platform in the X-direction;
• and
• the Z-direction micro motion platform (11) and the mounting base A (14) on the Z-direction sliding base (1) are inter-connected by four Z-direction flexible hinges (12) mounted symmetrically in front and rear of the Z-direction micro motion platform (11) to enable limited movement of the Z-direction micro motion platform in the Z-direction.