Coating apparatus
AssigneeKabushiki Kaisha Toshiba
InventorsTatuya Saeki, Hiroaki Kobayashi, Yasushi Shinjo
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AssigneeKabushiki Kaisha Toshiba
InventorsTatuya Saeki, Hiroaki Kobayashi, Yasushi Shinjo
Estimating the term…
Certain embodiments provided a coating apparatus includes an applicator, material supply unit, and first, second, and third moving mechanisms. The applicator includes a meniscus pillar forming portion configured to form a meniscus pillar of the material in conjunction with a surface to be coated of the object to be coated and a recess. The material supply unit supplies the material to the applicator. The first moving mechanism moves the position of the applicator relative to the surface along the surface. The second moving mechanism moves the position of the applicator relative to the surface so that the meniscus pillar between the surface and the recess. The third moving mechanism moves the position of the applicator relatively toward and away from the surface.
A coating apparatus which applies a material to an object to be coated, comprising:
A coating apparatus which applies a material to an object to be coated, comprising:
Dependencies are inferred from the claim text.