Apparatus for producing trichlorosilane

An apparatus for producing trichlorosilane in which reacted gas including trichlorosilane and hydrogen chloride is produced by heating raw gas including silicon tetrachloride and hydrogen, the apparatus comprising:

• a reaction vessel having a substantially cylindrical shape and being provided with a heated wall forming a gas flow-passage along an axis direction;
• and
• a heater heating the heated wall, wherein the heater is arranged at a radial center of the apparatus and the reaction vessel covers the heater;
• wherein a folding flow-passage is provided at an uppermost stream of the gas flow passage,
• the folding flow-passage has:
• an inlet flow-passage in which raw gas is introduced from outside of the reaction vessel and flows the raw gas along the axis direction;
• and
• a turning part connected to a downstream of the inlet flow-passage in which a flow direction of the raw gas is turned at least once in an opposite direction,
• the turning part is formed between the inlet flow-passage and the heated wall in the folding flow-passage, and
• a turning length of the folding flow-passage along the axis direction is not more than 50% of a maximum length of the gas flow-passage along the axis direction.