System and method for recycling high-boiling-point waste photoresist stripper

A system for recycling a high-boiling-point waste photoresist stripper, the system comprising:

• a first distillation device comprising a first feed inlet configured to receive the high-boiling-point waste photoresist stripper, the first distillation device configured to remove low-boiling-point impurities from the high-boiling-point waste photoresist stripper;
• a second distillation device comprising a second feed inlet being connected to a bottom outlet of the first distillation device, the second distillation device configured to
• remove high-boiling-point impurities from the high boiling-point waste photoresist stripper without the low-boiling-point impurities, and
• simultaneously recover a stripper solvent composition;
• a third distillation device being connected to a top outlet of the second distillation device, and configured to remove trace water from the stripper solvent composition without the high-boiling-point impurities;
• and
• a fourth distillation device connected to a bottom outlet of the second distillation device, and configured to perform second stripper recycling by additionally recovering a high-boiling-point stripper solvent from a high-boiling-point residue including the high-boiling-point impurities discharged by the second distillation device;
• a fifth distillation device connected to the top outlet of the second distillation device, connected to a top outlet of the fourth distillation device, and configured to perform third stripper recycling by sequentially and separately recovering, as individual high-purity electronic grade recycled stripper solvents, the stripper solvent composition recovered by the second distillation device and the high-boiling-point stripper solvent additionally recovered by the fourth distillation device, based on a boiling point of each stripper solvent of the stripper solvent composition.