Back to results
US 9,168,025 B2Granted
Ultrasonic probe and ultrasonic inspection apparatus
AssigneeSeiko Epson Corporation
InventorsTomoaki Nakamura, Hiroaki Hosomi
Life of this patent
Estimating the term…
Abstract
An ultrasonic probe includes a substrate, a diaphragm, a thin-film piezoelectric element, a communication passage, and an air hole. The substrate has first and second cavities thereon. The diaphragm is configured at the first cavity. The thin-film piezoelectric element is configured to the diaphragms. The communicating passage is configured in the substrate and extending from the first cavity to the second cavity. The air hole extends between the communicating passage to an outside of the substrate.
Claims7
An ultrasonic probe comprising:
- a substrate having first and second cavities;
- a first diaphragm disposed over the substrate and overlapping with the first cavity when viewed along a thickness direction of the substrate;
- a second diaphragm disposed over the substrate and overlapping with the second cavity when viewed along the thickness direction of the substrate;
- a first piezoelectric element disposed over the first diaphragm;
- and
- a second piezoelectric element disposed over the second diaphragm;
- the substrate further having a communicating passage and an air hole, the first cavity being communicated with the second cavity through the communicating passage, the communicating passage being communicated with an outside of the substrate through the air hole,
- the first piezoelectric element being configured to transmit or receive ultrasonic waves, and the second piezoelectric element being configured to transmit or receive ultrasonic waves.
5 more elements
An ultrasonic probe comprising:
- an ultrasonic device;
- and
- a housing supporting the ultrasonic device,
- the ultrasonic device including
- a substrate having first and second cavities,
- a first diaphragm disposed over the substrate and overlapping with the first cavity when viewed along a thickness direction of the substrate,
- a second diaphragm disposed over the substrate and overlapping with the second cavity when viewed along the thickness direction of the substrate,
- a first piezoelectric element disposed over the first diaphragm, and
- a second piezoelectric element disposed over the second diaphragm,
- the substrate further having a communicating passage, the first cavity being communicated with the second cavity through the communicating passage, the housing having an air hole, an interior of the housing being communicated with an exterior of the housing through the air hole.
7 more elements
Dependencies are inferred from the claim text.