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US 9,162,518 B2Granted
Method for producing microparticles
AssigneeMycartis NV
InventorsNicolas Demierre, Stephan Gamper
Life of this patent
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Abstract
Silicon microcarriers suitable for fluorescent assays as a well as a method of producing such microcarriers are provided. The method includes the steps of providing a SOI wafer having a bottom layer of monocristalline silicone, an insulator layer and a bottom layer of monocristalline silicon, delineating microparticles, etching away the insulator layer and then depositing an oxide layer on the wafer still holding the microparticles before finally lifting-off the microparticles.
Claims15
A method for producing microparticles suitable as support for fluorescent assays, comprising the steps of:
- (a) providing a wafer having a sandwich structure comprising a bottom layer, an insulator layer lying over the bottom layer and a top layer lying over the insulator layer;
- (b) etching the top layer to delineate microparticles which are thereby formed on the insulator layer;
- (c) etching away the insulator layer to remove all of the insulator layer;
- (d) depositing a layer on the wafer that is holding the microparticles, whereby mechanical forces that are capable of detaching the microparticles from the wafer are avoided;
- and
- (e) lifting-off the microparticles from the wafer, wherein step (d) occurs after step (c) and before step (e).
3 more elements
Dependencies are inferred from the claim text.