Apparatus for decomposing perfluorocarbon and harmful gas using high-density confined plasma source
AssigneeTeraTech Corporation
InventorsJin Hong, Gi-Chung Kwon
Life of this patent
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Abstract
The present invention relates to an apparatus for decomposing perfluorocarbons and harmful gas using a high-density confined plasma source that includes: a reactor having inlet and outlet ports formed in the top and bottom sides thereof for receiving and discharging perfluorocarbons and harmful gas, a chamber having an internal passage, a ferrite core formed outside of the chamber and connected to an antenna, and a permanent magnet arranged around the ferrite core; a gas supply portion for supplying a gas for decomposing the perfluorocarbons and harmful gas into the reactor; and a generator and a controller for supplying electric power for the antenna of the reactor.
Claims19
A perfluorocarbon decomposing apparatus comprising:
- a reactor having inlet and outlet ports, a chamber body, at least one ferrite core, and at least one permanent magnet, the inlet and outlet ports being formed in top and bottom sides of the reactor for receiving and discharging perfluorocarbons and harmful gas, the chamber body having an internal passage, the at least one ferrite core being formed outside of the chamber body and connected to an antenna, the at least one permanent magnet being arranged around the at least one ferrite core;
- a gas supply portion for supplying a gas for decomposing the perfluorocarbons and harmful gas into the reactor;
- and
- a generator and a controller for supplying electric power to the antenna of the reactor.
Dependencies are inferred from the claim text.