Processing liquid supply method, processing liquid supply apparatus and storage medium

An apparatus for supplying a processing liquid to an object to be processed from a nozzle to perform a liquid processing, comprising:

• a processing liquid supply source, a filter unit including a filtration member and the nozzle provided sequentially from an upstream side, the filter unit being provided with an introducing port through which the processing liquid is introduced into the filter unit, an external supply port through which the processing liquid is supplied to a nozzle, and a venting port through which an inside atmosphere of the filter unit is exhausted, and each of the external supply port and the venting port is configured to be selectively connected either to a drainage passage or an exhaust passage;
• a primary side valve, a secondary side valve, and a venting valve provided at a primary side, a secondary side, and a vent of the filter unit, respectively;
• a decompressing unit configured to decompress inside of the filter unit;
• and
• a control unit configured to control the valves and the decompressing unit,
• wherein the control unit executes a program stored in a nontransitory computer-readable recording medium that, when executed, causes a computer to perform:
• filling the processing liquid into the filter unit by supplying the processing liquid from the primary side of the filter unit such that the filtration member of the filter unit is immersed in the processing liquid, by opening the introducing port and the venting port while closing the external supply port, the venting port being connected to the drainage passage draining the processing liquid from the filter unit;
• continuing the filling of the processing liquid into the filter unit by opening the introducing port and the external supply port while closing the venting port, the external supply port being connected to the drainage passage, thereby continuing the immersing of the filtration member of the filter unit;
• after the continuing of the filling the processing liquid into the filter unit, decompressing the inside of the filter unit into a first pressure atmosphere which is a negative pressure atmosphere lower than a pressure at the time of supplying the processing liquid to an object to be processed by the decompressing unit, the decompressing being performed by closing the introducing port while opening the external supply port and the venting port, and each of the external supply port and the venting port being connected to the exhaust path thereby removing bubbles from the filter unit;
• after the decompressing, boosting the inside of the filter unit from the first pressure atmosphere to be an atmospheric pressure by closing the introducing port while opening the external supply port and the venting port, and each of the external supply port and the venting port being connected to the drainage passage;
• after the boosting, flowing the processing liquid into the filter unit from the primary side of the filter unit in a state where the secondary side of the filter unit is maintained at a second pressure atmosphere which is higher than the first pressure atmosphere but lower than the atmospheric pressure;
• and
• after the flowing, supplying the processing liquid flowing from the filter unit to the object through the nozzle to perform the liquid processing.

A nontransitory computer-readable storage medium storing a computer program, wherein the computer program is used in a liquid processing apparatus for supplying a processing liquid, and has a group of steps for executing a processing liquid supply method which are incorporated in the computer program, and

• wherein the method includes providing a filter unit including a filtration member in a dried state in the liquid processing apparatus, the filter unit being provided with an introducing port through which the processing liquid is introduced into the filter unit, an external supply port through which the processing liquid is supplied to a nozzle, and a venting port through which an inside atmosphere of the filter unit is exhausted, and each of the external supply port and the venting port is configured to be selectively connected either to a drainage passage or to an exhaust passage;
• filling the processing liquid into the filter unit by opening the introducing port and the venting port while closing the external supply port, the venting port being connected to the drainage passage draining the processing liquid from the filter unit such that the filtration member of the filter unit is immersed in the processing liquid;
• continuing the filling of the processing liquid into the filter unit by opening the introducing port and the external supply port while closing the venting port, the external supply port being connected to the drainage passage, thereby continuing the immersing of the filtration member of the filter unit;
• after the continuing the filling of the processing liquid into the filter unit, decompressing the inside of the filter unit into a first pressure atmosphere which is a negative pressure atmosphere lower than a pressure at the time of supplying the processing liquid to an object to be processed, the decompressing being performed by closing the introducing port while opening the external supply port and the venting port, and each of the external supply port and the venting port being connected to the exhaust path thereby removing bubbles from the filter unit;
• after the decompressing, boosting the inside of the filter unit from the first pressure atmosphere to be atmospheric pressure by closing the introducing port while opening the external supply port and the venting port, and each of the external supply port and the venting port being connected to the drainage passage;
• after the boosting, flowing the processing liquid into the filter unit from a primary side of the filter unit in a state where a secondary side of the filter unit is maintained at a second pressure atmosphere which is higher than the first pressure atmosphere but lower than the atmospheric pressure;
• and after the flowing, supplying the processing liquid flowing from the filter unit to the object to be processed through a nozzle thereby performing a liquid processing,
• wherein the apparatus is configured to supply the processing liquid to an object to be processed from a nozzle to perform a liquid processing, and comprises a processing liquid supply source, a filter unit and the nozzle provided sequentially from an upstream side.