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US 9,156,096 B2Granted
Tool cutting apparatus and tool cutting method for workpiece
AssigneeDisco Corporation
InventorsMasayuki Kawase, Takashi Mori, Ryoji Tanimoto
Life of this patent
Estimating the term…
Abstract
A tool cutting apparatus includes a chuck table for holding a workpiece, and rotatable cutting means having a cutting tip for cutting the front side of the workpiece. Pure water and an additive are mixed to prepare a cutting fluid, and a cutting fluid nozzle supplies the cutting fluid to the cutting tip and the workpiece held on the chuck table.
Claims4
A tool cutting apparatus comprising:
- a chuck table having a holding surface for holding a workpiece;
- rotatable cutting means having a cutting tip for cutting a front side of said workpiece held on said chuck table;
- first feeding means for relatively moving said chuck table and said cutting means in a direction parallel to said holding surface of said chuck table;
- second feeding means for relatively moving said chuck table and said cutting means in a direction perpendicular to said holding surface of said chuck table;
- a pure water source for supplying a pure water;
- an additive source for supplying an additive;
- a mixing unit for mixing said pure water supplied from said pure water source and said additive supplied from said additive source to prepare a cutting fluid;
- and
- a cutting fluid nozzle for supplying said cutting fluid prepared by said mixing unit to said cutting tip of said cutting means and said workpiece held on said chuck table;
- wherein said additive does not contain 0.1 mass % or more of a water-insoluble component and contains 0.001 to 50 mass % of a polymer having 50 mass % or more of a monomer unit represented by the general formula (1)
- wherein each of R1 to R3 stands for a hydrogen atom or a hydrocarbon radical having one to eight carbon atoms.
8 more elements
A tool cutting method comprising:
- a holding step of holding a workpiece on a chuck table having a holding surface for holding said workpiece in a condition where a back side of said workpiece is in contact with said holding surface and a front side of said workpiece is exposed;
- a cutting step of relatively moving said chuck table holding said workpiece and a rotatable cutting means having a cutting tip in a horizontal direction and feeding said cutting tip of said cutting means into said workpiece by a predetermined depth from the front side of said workpiece as rotating said cutting means, thereby cutting the front side of said workpiece;
- and
- a cutting fluid supplying step of supplying a cutting fluid prepared by mixing a pure water and an additive to said cutting tip of said cutting means and said workpiece held on said chuck table;
- wherein said additive does not contain 0.1 mass % or more of a water-insoluble component and contains 0.001 to 50 mass % of a polymer having 50 mass % or more of a monomer unit represented by the general formula (1)
- wherein each of R1 to R3 stands for a hydrogen atom or a hydrocarbon radical having one to eight carbon atoms.
3 more elements
Dependencies are inferred from the claim text.