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AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsHenri Sibuet, Yannick Vuillermet
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The invention concerns a method for the fabrication, on a plane substrate, of a microswitch actuatable by a magnetic field, comprising: a) the etching, in the upper face of the plane substrate, of cavities forming a hollow model of two strips, these cavities having vertical flanks extending perpendicularly to the plane of the substrate to form vertical faces of the strips, b) the filling of the cavities by a magnetic material to form the strips, then c) the etching in the substrate, by a method of isotropic etching, of a well that extends between the vertical faces of the strips and beneath and around one distal end of at least one of the strips to open out an air gap between these strips and make this distal end capable of being shifted between a closed position and an open position.
A method for fabricating, on a planar substrate, a microswitch actuatable by an external magnetic field, said method comprising etching, in an upper face of said planar substrate, cavities forming a hollow model of two strips, said cavities having vertical flanks extending perpendicularly to a plane of said planar substrate, filling said cavities with a magnetic material to form said two strips having vertical faces, said filling step including providing a conductive material on the vertical faces of said two strips, isotropically etching, in said planar substrate, a well that extends between said vertical faces of said two strips and beneath and around a distal end of at least one of said two strips to open an air gap between said two strips, whereby said distal end is made capable of being shifted between a closed position, in which said vertical faces of said two strips are in direct mechanical contact with each other to enable the passage of a current, and an open position, in which said vertical faces of said two strips are separated from each other by said air gap to electrically insulate one strip from the other, wherein the magnetic material is comprised of an alloy of iron and nickel.
A method for fabricating, on a planar substrate, a microswitch actuatable by an external magnetic field, said method comprising forming, in an upper face of said planar substrate, two strips having vertical faces extending perpendicularly to a plane of said planar substrate, said two strips having a conductive material on said vertical faces, isotropically etching, in said planar substrate, a well that extends between said vertical faces of said two strips and beneath and around a distal end of at least one of said two strips to open an air gap between said two strips, whereby said distal end is made capable of being shifted between a closed position, in which said vertical faces of said two strips are in direct mechanical contact with each other to enable the passage of a current, and an open position, in which said vertical faces of said two strips are separated from each other by said air gap to electrically insulate one strip from the other;
A method for fabricating, on a planar substrate, a microswitch actuatable by an external magnetic field, said method comprising etching, in an upper face of said planar substrate, cavities forming a hollow model of two strips, said cavities having vertical flanks extending perpendicularly to a plane of said planar substrate, filling said cavities with a magnetic material to form said two strips having vertical faces, said filling step including providing a conductive material on the vertical faces of said two strips, isotropically etching, in said planar substrate, a well that extends between said vertical faces of said two strips and beneath and around a distal end of at least one of said two strips to open an air gap between said two strips, whereby said distal end is made capable of being shifted between a closed position, in which said vertical faces of said two strips are in direct mechanical contact with each other to enable the passage of a current, and an open position, in which said vertical faces of said two strips are separated from each other by said air gap to electrically insulate one strip from the other, wherein providing the conductive material on at least the vertical faces of said two strips comprises, before filling said cavities with said magnetic material, causing deposition of a coating of said conductive material at least on said vertical flanks, with a thickness being smaller than half of a thickness of said strips.
Dependencies are inferred from the claim text.