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US 9,150,410 B2Granted
Coatings for relatively movable surfaces
AssigneeTexas Instruments Incorporated
InventorsWilliam Robert Morrison, Mark Christopher Fisher, Murali Hanabe, Ganapathy Subramaniam Sivakumar, Simon Joshua Jacobs
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Abstract
A device has a microelectromechanical system (MEMS) component with at least one surface and a coating disposed on at least a portion of the surface. The coating has a compound of the formula M(CnF2n+1Or), wherein M is a polar head group and wherein n≧2r. The value of n may range from 2 to about 20, and the value of r may range from 1 to about 10. The value of n plus r may range from 3 to about 30, and a ratio of n:r may have a value of about 2:1 to about 20:1.
Claims10
A method of protecting a device, the method comprising:
- receiving a microelectromechanical system (MEMS) component or semiconductor component;
- and
- disposing a coating on a surface of the MEMS component or the semiconductor component,
- wherein the coating comprises an amphiphilic compound comprising a hydrophilic head group bound to a hydrophobic tail, wherein the hydrophobic tail comprises a fluorinated carbon chain and at least one ether functional group disposed within the fluorinated carbon chain.
1 more element
Dependencies are inferred from the claim text.