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US 9,147,408 B1Granted
Heated AFM layer deposition and cooling process for TMR magnetic recording sensor with high pinning field
AssigneeWestern Digital (Fremont), LLC
InventorsYuankai Zheng, Qunwen Leng, Tong Zhao, Christian Kaiser, Zhitao Diao, Xin Jiang
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Abstract
Systems and methods are provided for manufacturing a magnetic recording sensor for use in a magnetic reader, such as a tunneling magnetoresistance (TMR) readers. The magnetic recording sensor can be manufactured by heating a substrate in a first chamber and depositing an antiferromagnetic (AFM) layer on the heated substrate. Additionally, a first pinned layer is added onto the AFM layer, and the substrate is subsequently cooled.
Claims11
A method for manufacturing a magnetic device on a substrate, comprising:
- heating the substrate in a first chamber;
- depositing an antiferromagnetic (AFM) layer on the heated substrate;
- adding a first pinned layer on the AFM layer;
- and
- cooling the substrate after adding the first pinned layer.
2 more elements
Dependencies are inferred from the claim text.