Coating compositions

A positive bottom photoimageable antireflective coating composition which is capable of being developed with an aqueous alkali developer wherein the antireflective coating composition comprises a polymer, wherein the polymer contains at least one unit with a hydroxyl, and/or a carboxyl group and at least one recurring unit with an absorbing chromophore;

• a vinyl ether terminated crosslinking agent;
• and one or more compounds having the formula
• PAG-(-L-OH)p
• where PAG is a photoacid generator;
• and where each L is a direct bond;
• p is 2 to 6 and further where the photoacid generator is selected from the group consisting of
• (i) onium salts selected from the group consisting of formula (P1a), (P1b), (P1c) (P1d), (P1e), (P1f) and (P1g),
• (ii) diazomethane derivatives,
• (iii) glyoxime derivatives),
• (iv) bissulfone derivatives,
• (v) sulfonic acid esters of N-hydroxyimide compounds,
• (vi) β-ketosulfonic acid derivatives,
• (vii) disulfone derivatives,
• (viii) nitrobenzylsulfonate derivatives,
• (ix) sulfonate derivatives,
• (x) benzyloxysulfonylbenzene derivatives,
• and mixtures thereof;
• wherein Ar is an unsubstituted aryl group of 6 to 20 carbon atoms;
• R10b and R10c independently represent, aryl groups of 6 to 20 carbon atoms, and A31 is an anion,
• wherein, Ar is as defined above, R12a and R12b independently represent aryl groups of 6 to 20 carbon atoms, R13 is selected from the group consisting of a straight, branched and cyclic alkylene group of 1 to 10 carbon atoms optionally containing one or more O atoms,
• wherein Ar is as defined above, R10b and R10c are independently defined as above and X−2 is a Q-R500—SO3−, where Q is selected from 31 O3S, or −O2C and where R500 is a group selected from linear or branched alkyl, cycloalkyl, aryl, or combinations thereof, where the alkyl, cycloalkyl, and aryl groups are unsubstituted or substituted by one or more groups selected from the group consisting of halogen, unsubstituted or substituted alkyl, unsubstituted or substituted C1-8 perfluoroalkyl, hydroxyl, cyano, sulfate, and nitro,
• wherein each R10b is independently defined as above;
• b and c are independently 0 to 4.