MEMS hinges with enhanced rotatability
OwnerRaviv Erlich, Yuval Gersoninventors
Life of this patent
Estimating the term…
Abstract
A mechanical device includes a long, narrow element made of a rigid, elastic material. A rigid frame is configured to anchor at least one end of the element, which is attached to the frame, and to define a gap running longitudinally along the element between the beam and the frame, so that the element is free to move within the gap. A solid filler material, different from the rigid, elastic material, fills at least a part of the gap between the element and the frame so as to permit a first mode of movement of the element within the gap while inhibiting a different, second mode of movement.
Claims19
A mechanical device, comprising:
- a long, narrow beam made of a rigid, elastic material;
- a rigid frame configured to anchor at least one end of the beam, wherein the beam is attached to the frame and comprises a hinge so as to rotate about a longitudinal axis thereof relative to the frame, the frame defining a gap running longitudinally along the beam between the beam and the frame, so that the beam is free to move within the gap;
- and
- a solid filler material, softer than the rigid, elastic material, which fills at least a part of the gap between the beam and the frame so as to permit a first mode of movement of the beam within the gap while inhibiting a different, second mode of movement.
A method for producing a mechanical device, the method comprising:
- forming, from a rigid, elastic material, a long, narrow beam having at least one end attached to a rigid frame, wherein the beam comprises a hinge so as to rotate about a longitudinal axis thereof relative to the frame with a gap running longitudinally along the beam between the beam and the frame, so that the beam is free to move within the gap;
- and
- filling at least a part the gap with a solid filler material, softer than the rigid, elastic material, so as to permit a first mode of movement of the beam within the gap while inhibiting a different, second mode of movement.
Dependencies are inferred from the claim text.