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US 9,139,416 B2Granted
Microfluidic devices for the generation of nano-vapor bubbles and their methods of manufacture and use
AssigneeUniversity of South Carolina
InventorsChen Li, Fanghao Yang, Xianming Dai, Yan Tong
Life of this patent
Estimating the term…
Abstract
Microfluidic devices having superhydrophilic bi-porous interfaces are provided, along with their methods of formation. The device can include a substrate defining a microchannel formed between a pair of side walls and a bottom surface and a plurality of nanowires extending from each of the side walls and the bottom surface. For example, the nanowires can be silicon nanowires (e.g., pure silicon, silicon oxide, silicon carbide, etc., or mixtures thereof).
Claims17
A microfluidic device with superhydrophilic bi-porous interfaces, comprising:
- a substrate defining a microchannel formed between a pair of side walls and a bottom surface;
- and
- a plurality of nanowires extending from each of the side walls and the bottom surface, wherein the nanowires extending from each of the side walls have tilt angle of about 30° to about 60° in relation to the bottom surface.
Dependencies are inferred from the claim text.