# US 9,136,301 B2 · Multi-wave band light sensor combined with function of IR sensing and method of fabricating the same

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- Number: US 9,136,301 B2
- Document ID: US9136301B2
- Status: Granted
- Kind: B2
- Application number: 14/020,908
- Filed: 2013-09-09
- Published: 2014-01-09
- Granted: 2015-09-15
- Earliest claimed: 2010-01-28
- Assignees: Maxchip Electronics Corp.
- Applicants: Maxchip Electronics Corp.
- Inventors: Jin-Wei Chang; Hung-Lung Wang; Jung-Kai Hung
- Web page: https://patentgrep.com/patent/US9136301B2

## CPC

- H10F 39/184: {Infrared image sensors}
- G01J 1/02: Details
- G01J 1/029: {Multi-channel photometry}
- G01J 1/08: Arrangements of light sources specially adapted for photometry {standard sources, also using luminescent or radioactive material}
- G01J 1/4204: {with determination of ambient light (solar light G01J2001/4266)}
- G01J 1/4228: {arrangements with two or more detectors, e.g. for sensitivity compensation}
- G01J 3/36: Investigating two or more bands of a spectrum by separate detectors
- H10F 39/103: {the at least one element covered by H10F30/00 having potential barriers, e.g. integrated devices comprising photodiodes or phototransistors}
- G01J 5/0846: {having multiple detectors for performing different types of detection, e.g. using radiometry and reflectometry channels}
- H10F 39/1847: {Multispectral infrared image sensors having a stacked structure, e.g. NPN, NPNPN or multiple quantum well [MQW] structures}
- H10F 39/8053: {Colour filters}
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)

## Abstract

Provided is a multi-wave band light sensor combined with a function of infrared ray (IR) sensing including a substrate, an IR sensing structure, a dielectric layer, and a multi-wave band light sensing structure. The substrate includes a first region and a second region. The IR sensing structure is in the substrate for sensing IR. The dielectric layer is on the IR sensing structure. The multi-wave band light sensing structure includes a first wave band light sensor, a second wave band light sensor, and a third wave band light sensor. The second wave band light sensor and the first wave band light sensor are overlapped and disposed on the IR sensing structure on the first region of the substrate from the bottom up. The third wave band light sensor is in the dielectric layer of the second region.

## Claims

### Claim 1

A multi-wave band light sensor combined with a function of infrared ray (IR) sensing, comprising:
a substrate comprising a first region and a second region;
an IR sensing structure in the substrate for sensing IR;
a dielectric layer on the substrate and covering the IR sensing structure; and
a multi-wave band light sensing structure on the substrate, comprising:
a first wave band light sensor on the dielectric layer of the first region and corresponding to the IR sensing structure;
a second wave band light sensor in the dielectric layer of the first region, wherein a first portion of the second wave band light sensor is overlapped with the IR sensing structure and the first wave band light sensor; and
a third wave band light sensor in the dielectric layer of the second region.

### Claim 2 (depends on 1)

The multi-wave band light sensor combined with a function of IR sensing of claim 1, wherein the first wave band light sensor comprises a high green light sensor, the second wave band light sensor comprises a red light sensor, and the third wave band light sensor comprises a high blue light sensor.

### Claim 3 (depends on 1)

The multi-wave band light sensor combined with a function of IR sensing of claim 1, wherein the first wave band light sensor, the second wave band light sensor, and the third wave band light sensor respectively comprise:
a lower electrode;
a hydrogenated amorphous silicon layer covering the lower electrode; and
a transparent upper electrode covering the hydrogenated amorphous silicon layer.

### Claim 4 (depends on 3)

The multi-wave band light sensor combined with a function of IR sensing of claim 3, wherein each of the hydrogenated amorphous silicon layers is a stacked structure comprising:
a hydrogenated amorphous silicon layer of a first conductivity type on the lower electrode;
an intrinsic hydrogenated amorphous silicon layer on the hydrogenated amorphous silicon layer of the first conductivity type; and
a hydrogenated amorphous silicon layer of a second conductivity type on the intrinsic hydrogenated amorphous silicon layer, wherein the first conductivity type is N-type and the second conductivity type is P-type.

### Claim 5 (depends on 3)

The multi-wave band light sensor combined with a function of IR sensing of claim 3, wherein a material of the transparent upper electrode comprises transparent conductive oxide and a material of the lower electrode comprises metal.

### Claim 6 (depends on 1)

The multi-wave band light sensor combined with a function of IR sensing of claim 1, wherein the second wave band light sensor and the third wave band light sensor are at a same level.

### Claim 7 (depends on 1)

The multi-wave band light sensor combined with a function of IR sensing of claim 1, wherein the second wave band light sensor and the third wave band light sensor are at a different level.

### Claim 8 (depends on 1)

The multi-wave band light sensor combined with a function of IR sensing of claim 1, wherein the second wave band light sensor and the third wave band light sensor are on a plurality of top metal layers of a plurality of metal interconnects and each of the lower electrodes is electrically connected to each of the corresponding metal interconnects.

### Claim 9 (depends on 8)

The multi-wave band light sensor combined with a function of IR sensing of claim 8, wherein the first wave band light sensor completely covers the IR sensing structure, a second portion of the first wave band light sensor is not overlapped with the second wave band light sensor, and the second portion is electrically connected to one of the top metal layers through a via.

### Claim 10 (depends on 1)

The multi-wave band light sensor combined with a function of IR sensing of claim 1, further comprising a plurality of light-shielding layers covering a surrounding of an upper surface of each of the first wave band light sensor, the second wave band light sensor, and the third wave band light sensor, and each of the light-shielding layers is respectively electrically connected to a bonding pad.

### Claim 11 (depends on 10)

The multi-wave band light sensor combined with a function of IR sensing of claim 10, wherein a level of the second wave band light sensor is greater than a level of the bonding pad.

### Claim 12 (depends on 1)

The multi-wave band light sensor combined with a function of IR sensing of claim 1, wherein the IR sensing structure comprises a well region in the substrate, the well region is in contact with the substrate, a conductivity type of the well region is different from a conductivity type of the substrate, and the well region and the substrate form a junction diode.

### Claim 13

A method of fabricating a multi-wave band light sensor combined with a function of IR sensing, comprising:
forming an IR sensing structure in a first region of a substrate for sensing IR;
forming a dielectric layer on the substrate; and
forming a multi-wave band light sensing structure, comprising:
forming a first wave band light sensor on the dielectric layer of the first region of the substrate; and
forming a second wave band light sensor in the dielectric layer of the first region of the substrate and forming a third wave band light sensor in the dielectric layer of a second region of the substrate, wherein a first portion of the second wave band light sensor is overlapped with the IR sensing structure and the first wave band light sensor.

### Claim 14 (depends on 13)

The method of claim 13, wherein the first wave band light sensor comprises a high green light sensor, the second wave band light sensor comprises a red light sensor, and the third wave band light sensor comprises a high blue light sensor.

### Claim 15 (depends on 13)

The method of claim 13, wherein a method of forming the first wave band light sensor, a method of forming the second wave band light sensor, and a method of forming the third wave band light sensor respectively comprise:
forming a lower electrode;
forming a hydrogenated amorphous silicon layer covering the lower electrode; and
forming a transparent upper electrode on the hydrogenated amorphous silicon layer.

### Claim 16 (depends on 15)

The method of claim 15, wherein each of the hydrogenated amorphous silicon layers is a stacked structure, a method of forming the stacked structures comprising:
forming a hydrogenated amorphous silicon layer of a first conductivity type on the lower electrode;
forming an intrinsic hydrogenated amorphous silicon layer on the hydrogenated amorphous silicon layer of the first conductivity type; and
forming a hydrogenated amorphous silicon layer of a second conductivity type on the intrinsic hydrogenated amorphous silicon layer, wherein the first conductivity type is N-type and the second conductivity type is P-type.

### Claim 17 (depends on 15)

The method of claim 15, wherein a material of the transparent upper electrode comprises transparent conductive oxide and a material of the lower electrode comprises metal.

### Claim 18 (depends on 13)

The method of claim 13, further comprising forming a plurality of vias and a plurality of metal interconnects in the dielectric layer, wherein the lower electrodes are respectively electrically connected to each of the metal interconnects through the corresponding vias.

### Claim 19 (depends on 18)

The method of claim 18, wherein a second portion of the first wave band light sensor is not overlapped with the second wave band light sensor, and the second portion is electrically connected to a top metal layer through one of the vias.

### Claim 20 (depends on 13)

The method of claim 13, further comprising respectively forming a light-shielding layer on each of the first wave band light sensor, the second wave band light sensor, and the third wave band light sensor and in a surrounding of each thereof, and each of the light-shielding layers is connected to a bonding pad.

### Claim 21 (depends on 13)

The method of claim 13, wherein a method of forming the IR sensing structure comprises forming a well region in the substrate, wherein the well region is in contact with the substrate, a conductivity type of the well region is different from a conductivity type of the substrate, and the well region and the substrate form a junction diode.