Process for plasma treatment employing ceramic-filled polyamideimide composite parts
AssigneeQuadrant Epp AG
InventorsScott Howard Williams, Richard William Campbell, Stephan Glander
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Abstract
Internal components of plasma reactors are composed of a toleratable, ceramic filled plasma-useful polymer such as a high temperature engineering thermoplastic, preferably a polyamideimide. The parts exhibit a low erosion rate upon exposure to plasma at low pressure.
Claims6
A plasma treating apparatus having a vacuum chamber adapted to receive a substrate to be plasma treated, and at least one apparatus component which is exposed to plasma in an interior of the apparatus, wherein the apparatus component is constructed of a toleratable ceramic-filled polyamideimide polymer, wherein the ceramic consists essentially of boron nitride, wherein the polyamideimide contains from 10 to 30 weight percent of boron nitride.
Dependencies are inferred from the claim text.