High speed x-ray inspection microscope

A system for forming x-ray images, comprising:

• a source of x-rays;
• a mount for holding an object;
• a scintillator that absorbs x-rays and emits visible photons;
• an optical system that forms a magnified image of the scintillator;
• and
• a means of converting the magnified image of the emitted photons into electronic signals;
• and in which
• an object is placed in the mount for holding an object;
• and in which
• the distance between the scintillator and the object is less than 1 mm.

A method for conducting metrology of an object, comprising:

• selecting an object for measurement;
• forming at least one image of the object using the system comprising:
• a source of x-rays;
• a mount for holding an object;
• a scintillator that absorbs x-rays and emits visible photons;
• an optical system that forms a magnified image of the scintillator;
• a means of converting the magnified image of the emitted photons into electronic signals;
• and
• a means of storing the electronic signals corresponding to the image;
• analyzing the electronic signals corresponding to the image with a predetermined recipe;
• determining at least one physical dimension for the object;
• and
• displaying the at least one physical dimension.

A method for conducting inspection of an object, comprising:

• selecting an object for inspection;
• forming at least one image of the object using the system comprising:
• a source of x-rays;
• a mount for holding an object;
• a scintillator that absorbs x-rays and emits visible photons;
• an optical system that forms a magnified image of the scintillator;
• a means of converting the magnified image of the emitted photons into electronic signals;
• and
• a means of storing the electronic signals corresponding to the image;
• analyzing the electronic signals corresponding to the image with a predetermined recipe for identification of defects;
• and
• displaying the results of the defect analysis.

A system for forming x-ray images, comprising:

• a source of x-rays;
• a means for positioning an object to be illuminated by x-rays from the x-ray source;
• a scintillator that absorbs x-rays and emits visible photons;
• an optical system that forms a magnified image of the scintillator;
• and
• a means of converting the magnified image of the emitted photons into electronic signals;
• and in which
• the optical system has an optical axis;
• and additionally comprising
• a means for adjusting the position of the source of x-rays
• such that the source spot of the x-ray emitter within the source of x-rays is not on the optical axis of the optical system.