Regenerative vacuum pump with axial thrust balancing means
AssigneeEdwards Limited
InventorsNigel Paul Schofield, Michael Chung Kau Liu
Life of this patent
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Abstract
A vacuum pump rotor suitable for use in a vacuum pump is described for a vacuum pump that comprises a regenerative pumping mechanism. The rotor has a generally disc-shaped configuration and is mounted on an axial shaft for rotation relative to a stator of a vacuum pump. The rotor has a first and second opposing surface on which a rotor formations are disposed, each rotor formation defining a portion of a pump stage formed between the pump rotor and a stator for pumping gas from an inlet to an outlet in the same radial direction along the first and second opposing surface. A conduit is provided to interconnect the portions of the pump stage and assist with pressure imbalance that might occur on opposing sides of the rotor.
Claims13
A vacuum pump rotor for use in a vacuum pump comprising a regenerative pumping mechanism, said rotor having a generally disc-shaped configuration and being mountable on an axial shaft for rotation relative to a stator of the vacuum pump, wherein the rotor comprising:
- first and second opposing planar surfaces;
- concentric circles of shaped recesses disposed on both the first and second opposing planar surfaces;
- at least one through-bore in the rotor from the first opposing surface to the second opposing surface, the at least one through-bore located radially inward from an innermost circle of shaped recesses on the first planar surface;
- at least one conduit extending from a portion of the first planar surface located between two shaped recesses in a first circle of shaped recesses through the rotor to a portion of the second planar surface located between two shaped recesses in a second circle of shaped recesses wherein the first circle of shaped recesses and the second circle of shaped recesses between together form an exhaust pump stage;
- and
- a circumferential gas bearing disposed on both the first and second planar surfaces and located such that the circle of shaped recesses of the exhaust pump stage is positioned radially between the circumferential gas bearing and the other concentric circles of shaped recesses on both the first and second planar surfaces.
A vacuum pump comprising:
- a generally disc-shaped rotor mounted to an axial shaft for rotation and having a first planar rotor surface on a first side and a second planar rotor surface on a second side, each rotor surface having concentric circles of shaped recesses;
- a stator having a first stator surface and a second stator surface, each stator surface being arranged to face one of the first or second rotor surfaces, wherein each stator surface comprises concentric channels with each channel facing and aligned with one of the circles of shaped recesses to form a pump stage thereby forming a plurality of pump stages on each side of the rotor such that gas is pumped between pump stages in a same radial direction on each side of the rotor;
- wherein a conduit is provided in the stator to interconnect an exhaust pump stage on the first side of the rotor to an exhaust pump stage on the second side of the rotor to allow the passage of gas for balancing the pressure in the exhaust pump stage, wherein the conduit is separated from an outlet by the exhaust pump stages.
A vacuum pump comprising:
- a rotor comprising:
- two parallel planar surfaces on opposite sides of the rotor, each surface having a plurality of recesses associated with a plurality of pump stages;
- and
- at least one through-bore;
- a stator comprising two planar surfaces, each surface comprising a plurality of channels with each channel associated with one of the plurality of pump stages;
- an inlet that directs a gas flow to the at least one through-bore such that a portion of the gas flow passes through the through-bore to produce a first sub-flow over one surface of the rotor and a second sub-flow over the other surface of the rotor;
- and
- a conduit in the stator connecting an exhaust pump stage on a first side of the rotor to an exhaust pump stage on a second side of the rotor such that the conduit is separated from an outlet of the pump by at least the exhaust pump stage on the first side of the rotor and the exhaust pump stage on the second side of the rotor.
Dependencies are inferred from the claim text.