Microscopic geometry cutting device and microscopic geometry cutting method

A microscopic geometry cutting method for providing a microscopic geometry on a surface of a workpiece using a microscopic geometry cutting device including:

• a table on which a workpiece is mounted;
• a cutter;
• an X-axis moving mechanism and a Y-axis moving mechanism that relatively move the table and the cutter in X-axis direction and Y-axis direction which are orthogonal to each other;
• a Z-axis moving mechanism having a cutting shaft that advances and retracts the cutter in Z-axis direction which is orthogonal to the X-axis direction and the Y-axis direction;
• and a reciprocating stage that is provided on the cutting shaft and changes a cutting depth of the cutter at high speed in the Z-axis direction, the microscopic geometry cutting method comprising:
• a step for controlling a drive of the respective moving mechanisms in accordance with a driving program and outputting a timer count start command in starting the driving program;
• an arrival time calculating step for calculating an arrival time from when the timer count start command is output till when the cutter arrives at a machining start position of the workpiece in accordance with relative movement speed information of at least one of the X-axis moving mechanism and Y-axis moving mechanism and machining start position information of the workpiece;
• an elapsed time determining step for measuring an elapsed time from when the controller outputs the timer count start command, determining whether the elapsed time is coincident with the arrival time calculated in the arrival time calculating step, and outputting a trigger signal when the elapsed time is coincident with the arrival time;
• and
• a reciprocating stage driving step for driving the reciprocating stage in a manner that the cutter advances and retracts in a predetermined cutting depth when the trigger signal is output.