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US 9,124,151 B2Granted
Driving apparatus, exposure apparatus, and method of manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorsAkira Morohashi, Nobushige Korenaga
Life of this patent
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Abstract
The present invention provides a driving apparatus including an axis member supported on a base, and a movable member movable along the axis member, comprising a plurality of plate members each including a through-hole through which the axis member penetrates and surrounding the axis member, wherein the plurality of plate members are located apart from each other in a moving direction of the movable member.
Claims12
A driving apparatus comprising:
- an axis member;
- a movable member movable along an axial direction of the axis member and engaged with the axis member;
- and
- a cover unit connected to the movable member and movable together with the movable member, and includes:
- a cover member that covers a portion of the axis member;
- a plurality of plate members each including a through-hole through which the axis member penetrates,
- wherein the plurality of plate members are located spaced apart from each other in a moving direction of the movable member;
- and
- spacer that maintains gaps between the plurality of plate members,
- wherein the spacer is disposed so that a gap between the axis member and the spacer is greater than a gap between the axis member and the plurality of plate members.
7 more elements
An exposure apparatus for exposing a substrate, the exposure apparatus comprising:
- a substrate stage configured to hold the substrate;
- and
- a driving apparatus configured to drive the substrate stage,
- wherein the driving apparatus includes:
- an axis member;
- a movable member movable along an axial direction of the axis member and engaged with the axis member;
- and
- a cover unit connected to the movable member and movable together with the movable member, and includes:
- a cover member that covers a portion of the axis member;
- a plurality of plate members each including a through-hole through which the axis member penetrates,
- wherein the plurality of plate members are spaced apart from each other in a moving direction of the movable member;
- and
- a spacer that maintains gaps between the plurality of plate members,
- wherein the spacer is disposed so that a gap between the axis member and the spacer is greater than a gap between the axis member and the plurality of plate members.
11 more elements
A method of manufacturing an article, the method comprising the steps of:
- exposing a substrate using an exposure apparatus for exposing a substrate;
- developing the exposed substrate;
- and
- processing the developed substrate to manufacture the article,
- wherein the exposure apparatus includes:
- a substrate stage configured to hold the substrate;
- and
- a driving apparatus configured to drive the substrate stage,
- wherein the driving apparatus includes:
- an axis member;
- a movable member movable along an axial direction of the axis member and engaged with the axis member;
- and
- a cover unit connected to the movable member and movable together with the movable member, and includes:
- a cover member that covers a portion of the axis member,
- a plurality of plate members each including a through-hole through which the axis member penetrates,
- wherein the plurality of plate members are spaced apart from each other in a moving direction of the movable member,
- a spacer that maintains gaps between the plurality of plate members,
- wherein the spacer is disposed so that a gap between the axis member and the spacer is greater than a gap between the axis member and the plurality of plate members.
15 more elements
A driving apparatus comprising:
- an axis member;
- a movable member movable along an axial direction and engaged with the axis member;
- and
- a cover unit connected to the movable member, movable together with the movable member, and includes a portion that covers a portion of the axis member,
- wherein the portion of the cover unit includes:
- a plurality of plate members each including a through-hole through which the axis member penetrates, and located spaced apart from each other in a moving direction of the movable member;
- and
- a gap maintaining portion that maintains gaps between the plurality of plate members, and is configured so that a gap between the axis member and the gap maintaining portion is longer than a gap between the axis member and the plurality of plate members.
5 more elements
Dependencies are inferred from the claim text.