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US 9,123,755 B2Granted
System and method for controlling a thermal array
AssigneeWatlow Electric Manufacturing Company
InventorsCal T. Swanson, Philip S. Schmidt, John F. Lemke
Life of this patent
Estimating the term…
Abstract
A system and method is provided. The system and method calculate target setpoints for each thermal element and index through each thermal element to provide power to the thermal element, sense an electrical characteristic of the thermal element, and determine if the thermal element exceeds a target setpoint for the thermal element based on the sensed electrical characteristic.
Claims22
A thermal system comprising:
- a plurality of thermal elements;
- a control system having a plurality of power nodes, wherein each thermal element is connected between the plurality of power nodes, the control system being configured to calculate target setpoints for each thermal element based on temperature set points provided by a user and index through each thermal element to (a) provide power to the thermal element by providing power to at least one of the power nodes and a return to another of the power nodes, (b) sense an electrical characteristic of the thermal element by measuring the electrical characteristic across the power nodes connected to the thermal elements, and (c) determine if the thermal element exceeds a target setpoint for the thermal element based on the sensed electrical characteristic.
A thermal system comprising:
- a plurality of thermal elements;
- a control system having a plurality of power nodes, wherein each thermal element is connected between the plurality of power nodes, the control system defining a plurality of power modes for activating the plurality of thermal elements, the control system being configured to calculate target setpoints for each thermal element based on temperature set points provided by a user and index through each mode to (a) provide power to the thermal elements according to the mode by providing power to at least one of the power nodes and a return to another of the power nodes, (b) sense an electrical characteristic of the mode by measuring the electrical characteristic across the power nodes connected to the thermal element, and (c) determine if each thermal element exceeds a target setpoint for the thermal element based on the sensed electrical characteristic.
A heater comprising:
- a base plate;
- a base heater secured to the base plate;
- a substrate secured to the base heater;
- a tuning heater secured to the substrate, the tuning heater comprising a plurality of heater elements;
- a chuck secured to the tuning heater;
- and
- a control system having a plurality of power nodes, wherein each heater element is connected between the plurality of power nodes, the control system being configured to calculate target setpoints for each heater element based on temperature set points provided by a user and index through each heater element to (a) provide power to the heater element by providing power to at least one of the power nodes and a return to another of the power nodes, (b) sense an electrical characteristic of the heater element by measuring the electrical characteristic across the power nodes connected to the heater element, and (c) determine if the heater element exceeds a target setpoint for the heater element based on the sensed electrical characteristic.
4 more elements
A method for controlling a thermal array, the method comprising:
- calculating target setpoints for each thermal element of a plurality of thermal elements;
- providing power to each thermal element,
- sensing an electrical characteristic each thermal element, and
- determining if each thermal element exceeds a target setpoint for the thermal element based on the sensed electrical characteristic.
1 more element
Dependencies are inferred from the claim text.