Redundantable robot assembly for workpiece transfer
AssigneeDynamic Micro Systems
InventorLutz Rebstock
Life of this patent
Estimating the term…
Abstract
A redundantable robotic mechanism is disclosed for improving reliability of transport equipment. The redundantable robot assembly typically comprises independent robots with separate controls, motors, linkage arms, or power, thus providing the capability of operation even if parts of the assembly are not operational or when parts of the assembly are removed for repair. The redundantable robot assembly can be also designed to allow in-situ servicing, e.g. servicing one robot when the other is running. The disclosed redundantable robot assembly provides virtual uninterrupted process flow, and thus greatly increases the yield for the manufacturing facility.
Claims14
A method for improving reliability of an equipment having workpiece movement, the equipment comprising a redundantable workpiece transfer mechanism, the redundantable workpiece transfer mechanism comprises
- at least two independent workpiece transfer assemblies,
- wherein each independent workpiece transfer assembly is configured to perform same workpiece transfers on a same workpiece as the other workpiece transfer assemblies, so that when a workpiece transfer assembly fails, the other workpiece transfer assemblies are capable of performing the transfer for the failed workpiece transfer assembly,
- wherein each independent workpiece transfer assembly is capable of transferring the workpieces regardless of the operating status of other workpiece transfer assemblies,
- the method comprising
- rotating a carousel stocker storage,
- wherein the carousel stocker storage is configured to support multiple workpieces arranged in circular configurations around an axis of rotation,
- wherein the carousel stocker storage is rotated to present a workpiece to the redundantable workpiece transfer mechanism,
- determining operatable workpiece transfer assemblies, and
- allocating the movement of the workpieces to the operatable workpiece transfer assemblies,
- wherein allocating to the operatable workpiece transfer assemblies comprises re-assigning workpieces that are assigned to an inoperative workpiece transfer assembly, and
- wherein allocating to the operatable workpiece transfer assemblies comprises re-assigning the movement of the workpieces to a just-become-operating workpiece transfer assembly.
A method comprising
- rotating a carousel stocker storage,
- wherein the carousel stocker storage is configured to support multiple workpieces arranged in circular configurations around an axis of rotation,
- wherein the carousel stocker storage is rotated to present a workpiece to the redundantable workpiece transfer mechanism,
- transferring the workpiece using the redundantable workpiece transfer mechanism,
- wherein the redundantable workpiece transfer mechanism comprises at least two independent workpiece transfer assemblies,
- wherein each independent workpiece transfer assembly is configured to perform a same workpiece transfer operation on a same workpiece as the other workpiece transfer assemblies, so that when a workpiece transfer assembly fails, the other workpiece transfer assemblies are capable of performing the transfer for the failed workpiece transfer assembly,
- wherein each independent workpiece transfer assembly is capable of transferring the workpieces regardless of the operating status of other workpiece transfer assemblies,
- wherein the redundantable workpiece transfer mechanism is configured to allow in-situ servicing an independent workpiece transfer assembly while other independent workpiece transfer assemblies are still operational.
Dependencies are inferred from the claim text.