Scanner device and device for measuring three-dimensional shape of object

An object surface information acquisition method for importing surface information of an object (M) by projecting a line pattern (U) of light onto the object (M), comprising:

• a preparation step of creating a hologram recording medium (45, 46, 85) by recording an image (35) of a scatter body (30) for forming a line pattern (U) as a hologram on a recording medium (40, 80);
• a projection step of irradiating a coherent light beam (L60) onto the hologram recording medium (45, 46, 85) in a state where the object (M) is disposed at a position to be irradiated with reproduction light of a hologram obtained from the hologram recording medium (45, 46, 85) and scanning the light beam (L60) on the hologram recording medium (45, 46, 85) so that an irradiation position (P1, P2) changes with time, and projecting the line pattern (U) onto the object (M);
• and
• an imaging step of capturing an image of the object (M) onto which the line pattern (U) is projected from a predetermined direction, and importing surface information of the object (M), wherein
• in the preparation step, coherent illumination light (L12) is irradiated onto the scatter body (30) so that scattered light (L30) obtained from the scatter body (30) is used as object light, coherent light (L23, Lref) with the same wavelength as that of the illumination light (L12) is irradiated onto the recording medium (40, 80) along respective particular optical paths so as to be used as reference light, and interference fringes formed by the object light and the reference light are recorded on the recording medium (40, 80) to prepare the hologram recording medium (45, 46, 85), and
• in the projection step, a light beam (L60, L65) with a wavelength capable of reproducing the image (35) of the scatter body is scanned so as to advance toward an irradiation position on the hologram recording medium (45, 46, 85) by passing through an optical path along one of said particular optical paths of the reference light (L23, Lref) so that wherein the image of the scatter body (30) recorded on the hologram recording medium (45, 46, 85) is reproduced as a reproduction image (35) when the light beam irradiates from a single irradiation position (P1, P2) on the hologram recording medium,
• wherein multiple reproduction images (35) of the scatter body (30) are produced as the light beam moves between irradiation positions (P1, P2) on the hologram recording medium (45, 46, 85), wherein the multiple reproduction images (35) are identical to each other and produced at a same position irrespective of the actual irradiation position (P1, P2) used to create the reproduction image (35).

An apparatus for measuring a three-dimensional shape of an object (M), comprising:

• an illumination unit (100, 110) that projects a line pattern (U) of light onto the object (M);
• an imaging unit (300, 301 to 303) that captures an image of the object (M) onto which the line pattern (U) is projected from a predetermined direction;
• and
• a shape analysis unit (400) that creates three-dimensional shape data (T) of the object (M) by analyzing the line pattern (U) on the image (G) captured with the imaging unit (300, 301 to 303), wherein
• the illumination unit (100, 110) includes
• a coherent light source (50) that generates a coherent light beam (L50),
• a hologram recording medium (45, 46, 85) on which an image (35) of a scatter body (30) having a shape corresponding to the line pattern (U) is recorded, and
• a light beam scanning device (60, 65) that irradiates the light beam (L60, L65) onto the hologram recording medium (45, 46, 85) and scans the light beam so that an irradiation position (P1, P2) of the light beam (L60, L65) on the hologram recording medium (45, 46, 85) changes with time, wherein
• the image of the scatter body (30) is recorded as a hologram on the hologram recording medium (45, 46, 85) as a form of interference fringes which reproduce the image of the scatter body (30) when the light beam (L61, L62) is given as illumination light advancing toward the respective irradiation positions (P1, P2) on the hologram recording medium along respective particular optical paths,
• wherein the image of the scatter body (30) recorded on the hologram recording medium (45, 46, 85) is reproduced as a reproduction image (35) when the light beam irradiates from a single irradiation position (P1, P2) on the hologram recording medium,
• wherein multiple reproduction images (35) of the scatter body (30) are produced as the light beam moves between irradiation positions (P1, P2) on the hologram recording medium (45, 46, 85), wherein the multiple reproduction images (35) are identical to each other and produced at a same position irrespective of the actual irradiation position (P1, P2) used to create the reproduction image (35),
• the coherent light source (50) generates a light beam (L50) with a wavelength capable of reproducing the reproduction image (35) of the scatter body,
• the light beam scanning device (60, 65) scans the light beam (L60, L65) so that an irradiation direction of the light beam (L60, L65) onto the hologram recording medium (45, 46, 85) is along one of said particular optical paths, and
• the line pattern (U) is projected by reproduction light of the hologram obtained from the hologram recording medium (45, 46, 85).