Laser etching a stack of thin layers for a connection of a photovoltaic cell
AssigneeNexcis
InventorBrendan Dunne
Life of this patent
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Abstract
A treatment of thin layers for forming a connection of a photovoltaic cell including the thin layers, which includes a first layer, having photovoltaic properties, deposited on a second layer, and the second layer, which is a metal contact layer, deposited on a substrate, the treatment including etching, in the first layer, at least one first trench having a first width so as to expose the second layer; and etching, in the first trench, a second trench so as to expose the substrate, the second trench having a second width less than the first width.
Claims19
A method of treating thin layers for forming a connection of a photovoltaic cell comprising said thin layers, said thin layers comprising:
- a first layer, with photovoltaic properties, deposited on a second layer, and
- said second layer, which is a metal contact layer, deposited on a substrate, the method comprising:
- etching, in said first layer, at least one first trench having a first width so as to expose the second layer;
- and
- etching, in said first trench, a second trench so as to expose the substrate, the second trench having a second width less than the first width,
- the etching of the first and second trenches being carried out by laser impacts, during a single overall etching step,
- wherein said overall etching step comprises:
- a fine etching operation close to first and second fronts intended to delimit the first trench, and
- a rough etching operation between the first and second fronts.
Dependencies are inferred from the claim text.