Device for quantifying the degassing of a piece of equipment arranged in a vacuum chamber
AssigneeThales
InventorAlain Bettacchioli
Life of this patent
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Abstract
A device for quantifying the degassing of a piece of equipment placed in a vacuum chamber includes a metal blade made from a ferromagnetic material including a fixed end and a free end, the blade being provided with a cooling device and a device for measuring an intrinsic temperature of the blade; an electromagnet for exciting the blade; and a measurement sensor for measuring the excitation of the free end of the blade connected to a device for acquiring measurements and for calculating at least one oscillation frequency of the free end of the blade, the acquisition and calculation device being connected to a device for calculating a surface density of a mass deposited on the blade.
Claims8
A quantification device for quantifying the degassing of a piece of equipment placed in a vacuum chamber, the quantification device comprising:
- a metal blade made from a ferromagnetic material comprising a fixed end and a free end, the blade being provided with a cooling device and a measurement device for measuring an intrinsic temperature of the blade;
- an electromagnet for exciting the blade;
- and
- a measurement sensor for measuring the excitation of the free end of the blade connected to a signal conditioning device comprising an acquisition and calculation device for acquiring measurements and for calculating at least one oscillation frequency of the free end of the blade, the acquisition and calculation device being connected to a calculation device for calculating a surface density of a mass deposited on the blade,
- wherein the cooling device is configured to cool the blade to a temperature lower than a solidification temperature of polluting particles being deqassed in the vacuum chamber.
Dependencies are inferred from the claim text.