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US 9,103,738 B2Granted
Capacitive pressure sensor with intrinsic temperature compensation
AssigneeDynisco Instruments LLC
InventorsLeo E. Barron, John A. Czazasty
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Abstract
Pressure sensors and their methods of use are described. In one embodiment, a pressure sensor includes a probe body and a capacitive sensor disposed at a distal end of the probe body. The capacitive sensor produces a sensing capacitance. The pressure sensor also includes a shunt capacitance. In the described pressure sensor, a change in the sensing capacitance due to dimensional changes associated with a temperature change is offset by a corresponding change in the shunt capacitance.
Claims20
A pressure sensor, comprising:
- a probe body;
- a capacitive sensor disposed at a distal end of the probe body, the capacitive sensor producing a sensing capacitance;
- a shunt capacitance;
- and
- wherein a change in the sensing capacitance resulting from a change in temperature is intrinsically offset by a corresponding change in the shunt capacitance.
2 more elements
A method of making a pressure sensor, comprising:
- arranging a pressure deflectable diaphragm cap having a first capacitive surface on a probe body;
- electrically coupling the first capacitive surface to the probe body;
- selecting a material having a desired dielectric constant and forming a non-deformable component from the material;
- forming a second capacitive surface on a portion of the non-deformable component;
- connecting a lead to the second capacitive surface and positioning the non-deformable component within the probe body wherein a shunt capacitance is defined between the lead and the probe body;
- and
- arranging the non-deformable component relative to the pressure deflectable diaphragm cap by spacing the second capacitive surface away from the first capacitive surface such that the first and second surfaces define a capacitive sensor having a sensing capacitance, wherein a change in the sensing capacitance resulting from a change in temperature is offset by a corresponding change in the shunt capacitance.
4 more elements
Dependencies are inferred from the claim text.