Device and method for supplying gas while dividing to chamber from gas supplying facility equipped with flow controller

A method for supplying gas while dividing to a chamber from a gas supply facility equipped with a flow controller, the method comprising the steps of:

• supplying a specified quantity Q of gas, while dividing at a specified flow rate ratio Ql/Q2 from a gas supply facility provided with a flow controller, into a chamber through a plurality of branch supply lines including a first branch supply line and a second branch supply line and shower plates are fixed to ends thereof, wherein a first open/close valve and a second open/close valve are installed on the first branch supply line and on the second branch supply line, respectively, a first bypass line is disposed on a downstream side of the first open/close valve and is branched from the first branch supply line and a second bypass line is disposed on a downstream side of the second open/close valve and is branched from the second branch supply line, a pressure type division quantity controller is connected to the first bypass line and to the second bypass line, a first pressure sensor is disposed to measure pressure inside the first branch supply line and a second pressure sensor is disposed to measure pressure inside the second branch supply line GL2 so that a total quantity Q=Q1+Q2 of gas is supplied, while dividing, into a chamber at desired division quantities Q1 and Q2 by opening the open/close valve of whichever one of the first branch supply line and the second branch supply line has a larger flow rate to regulate a degree of opening of the pressure type division quantity controller FV;
• and
• adjusting flow rate of the one branch supply line that has the larger flow rate to the flow rate of the other branch supply line that has the smaller flow rate, thus regulating pressure in the first branch supply line and the second branch supply line, wherein Q1 and Q2 are specified quantities of gas supplied to the first branch supply line and the second branch supply line, respectively.