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US 9,096,931 B2Granted
Deposition valve assembly and method of heating the same
AssigneeASM America, Inc.
InventorsAndrew M. Yednak, III, Todd Dunn, Carl White, Michael Manasco
Life of this patent
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Abstract
A valve assembly including a mounting block having a first surface, a plurality of valves connected to the mounting block first surface, at least one fluid line connecting the plurality of valves spaced apart from the mounting block first surface, a heating element spaced apart from the at least one fluid line and located within a first insulating layer, and wherein the first insulating layer extends less than completely around the at least one fluid line.
Claims19
A valve assembly comprising:
- a mounting block having a first surface;
- a plurality of valves connected to the mounting block first surface;
- a plurality of fluid lines, wherein at least one fluid line couples two of the plurality of valves spaced apart from the mounting block first surface;
- a heating element located within a first insulating layer and overlying the plurality of fluid lines and the mounting block, wherein the plurality of fluid lines are between the mounting block and the heating element, and
- a second insulating layer adjacent the first insulating layer and between the at least one fluid line and the mounting block first surface,
- wherein the plurality of fluid lines are between the first insulating layer and the second insulating layer, and
- wherein the first insulating layer extends over a portion and less than completely around the at least one fluid line.
4 more elements
A valve assembly comprising:
- a processing fluid inlet;
- a carrier line located upstream and in fluid communication with the processing fluid inlet to allow mixing of a carrier fluid and a precursor fluid within the valve assembly;
- a mounting block having a mounting surface;
- a plurality of valves connected to the mounting block mounting surface;
- a plurality of fluid lines, wherein at least one fluid line is in fluid communication with two of the plurality of valves above the mounting block mounting surface;
- and
- a heating element located within a first insulating layer and overlying the plurality of fluid lines and the mounting block,
- wherein the plurality of fluid lines are between the mounting block and the heating element;
- a second insulating layer adjacent the first insulating layer and between the at least one fluid line and the mounting block,
- wherein the plurality of fluid lines are between the first insulating layer and the second insulating layer, and
- wherein the first insulating layer extends over a portion and less than completely around the at least one fluid line.
8 more elements
Dependencies are inferred from the claim text.