Refractory metal plates with improved uniformity of texture
AssigneeH.C. Starck GmbH
InventorsPeter R. Jepson, Dincer Bozkaya
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Abstract
A refractory metal plate is provided. The plate has a center, a thickness, an edge, a top surface and a bottom surface, and has a crystallographic texture (as characterized by through thickness gradient, banding severity; and variation across the plate, for each of the texture components 100//ND and 111//ND, which is substantially uniform throughout the plate.
Claims23
A refractory metal plate having a center, a thickness, en edge, a top surface and a bottom surface, the refractory metal plate having a crystallographic texture as characterized by
- through thickness gradient;
- banding severity;
- and
- variation across the plate,
- for the texture components 100//ND and 111//ND using electron back-scatter diffraction with a 15 μm step in both the horizontal and vertical directions for each measurement,
- wherein the maximum through-thickness gradient is less than or equal to 13% per mm, the maximum banding severity is less than or equal to 8%, and the maximum variation across the plate is lass than or equal to 11%;
- wherein the metal plate is at least 99.95% pure refractory metal;
- and
- wherein the metal plate has a grain size that is less than 60 μm.
The refractory metal plate of clalm 1, wherein the metal plate is manufactured by ingot metallurgy, and the metal plate is a sputtering target.
Dependencies are inferred from the claim text.