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US 9,093,979 B2Granted
Laterally-coupled acoustic resonators
AssigneeAvago Technologies General IP (Singapore) Pte. Ltd.
InventorKun Wang
Life of this patent
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Abstract
An apparatus, comprises a piezoelectric layer, a first acoustic resonator comprising first and second electrodes formed on opposite sides of the piezoelectric layer, and a second acoustic resonator comprising first and second electrodes formed on opposite sides of the piezoelectric layer and acoustically coupled to the first acoustic resonator.
Claims32
An apparatus, comprising:
- a piezoelectric layer;
- a first acoustic resonator comprising first and second electrodes formed on opposite sides of the piezoelectric layer the first electrode of the first acoustic resonator comprising a first electrode bus connected to a first plurality of finger structures;
- and
- a second acoustic resonator comprising first and second electrodes formed on opposite sides of the piezoelectric layer and acoustically coupled to the first acoustic resonator, the first electrode of the second acoustic resonator comprising a second electrode bus connected to a second plurality of finger structures, wherein the respective second electrodes do not overlap either the first electrode bus, or the second electrode bus.
1 more element
An apparatus, comprising:
- a piezoelectric layer;
- a first acoustic resonator comprising first and second electrodes formed on opposite sides of the piezoelectric layer, the first electrode of the first acoustic resonator comprising a first electrode bus connected to a first plurality of finger structures;
- and
- a second acoustic resonator comprising first and second electrodes formed on opposite sides of the piezoelectric layer and acoustically coupled to the first acoustic resonator, the first electrode of the second acoustic resonator comprising a second electrode bus connected to a second plurality of finger structures, wherein the respective first electrodes of the first and second acoustic resonators are electrically separated from each other, and the respective second electrodes of the first and second acoustic resonators are electrically connected to each other, and do not overlap either the first electrode bus or the second electrode bus.
1 more element
An apparatus, comprising:
- a piezoelectric layer;
- a first acoustic resonator comprising first and second electrodes formed on opposite sides of the piezoelectric layer, the first electrode of the first acoustic resonator comprising a first electrode bus connected to a first plurality of finger structures;
- and
- a second acoustic resonator comprising first and second electrodes formed on opposite sides of the piezoelectric layer and acoustically coupled to the first acoustic resonator, the first electrode of the second acoustic resonator comprising a second electrode bus connected to a second plurality of finger structures arranged in an interdigital configuration with respect to the first plurality of finger structures, the first and second pluralities of fingers having a first thickness, and the first and second electrode buses having a second thickness greater than the first thickness, wherein the respective second electrodes do not overlap either the first electrode bus or the second electrode bus.
1 more element
A method of manufacturing an acoustic resonator pair, comprising:
- forming a bottom electrode on a substrate:
- forming a piezoelectric layer on the bottom electrode;
- forming a top electrode on the piezoelectric layer;
- and
- patterning the top electrode to form a first electrode bus connected to a first plurality of finger structures and a second electrode bus connected to a second plurality of finger structures arranged in an interdigital configuration with respect to the first plurality of finger structures;
- and
- removing a portion of the e bottom electrode from a region that overlaps the first and second electrode buses.
4 more elements
Dependencies are inferred from the claim text.