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US 9,090,046 B2Granted
Ceramic coated article and process for applying ceramic coating
AssigneeApplied Materials, Inc.
InventorsJennifer Y. Sun, Biraja P. Kanungo, Ren-Guan Duan, Sumit Agarwal, Dmitry Lubomirsky
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Abstract
To manufacture a ceramic article, a ceramic body comprising Al2O3 is roughened to a roughness of approximately 140 micro-inches (μin) to 240 μin. The ceramic body is subsequently cleaned and then coated with a ceramic coating. The ceramic coating comprises a compound of Y4Al2O9 (YAM) and a solid solution of Y2-xZrxO3. The ceramic coating is then polished.
Claims12
A ceramic article comprising a ceramic body and a ceramic coating, the ceramic article having been prepared by a process comprising:
- applying a first mask to a first region of the ceramic body, wherein the first region is along an outer edge of the ceramic body and the ceramic body comprises Al2O3;
- roughening the ceramic body to a roughness of approximately 140 micro-inches (μin) to approximately 240 μin, wherein the first region of the ceramic body covered by the first mask is not roughened;
- cleaning the ceramic body;
- applying a second mask to the first region of the ceramic body;
- coating the ceramic body with the ceramic coating using a mixture comprising a first ceramic powder of Y2O3, a second ceramic powder of ZrO2 and a third ceramic powder of Al2O3, wherein the ceramic coating is formed from the first ceramic powder of Y2O3, the second ceramic powder of ZrO2 and the third ceramic powder of Al2O3, and wherein the first region of the ceramic body is an uncoated region after the coating;
- and
- polishing the ceramic coating, wherein the ceramic body comprises a hole, and wherein walls of the hole are not coated by the ceramic coating.
4 more elements
A ceramic lid for a plasma etch reactor, comprising:
- a ceramic body comprising Al2O3, a first region of a side of the ceramic body having a roughened surface with a roughness of approximately 140 micro-inches (pin) to approximately 240 μin and a second region of the side having an unroughened surface, wherein the second region is along an outer edge of the ceramic body;
- and
- a ceramic coating on the first region of the ceramic body, wherein the ceramic coating comprises a compound of Y4Al2O9 and a solid-solution of Y2O3—ZrO2 and has a thickness of approximately 8-10 mil, wherein the second region of the ceramic body lacks the ceramic coating;
- wherein the ceramic body comprises a hole, and wherein walls of the hole are not coated by the ceramic coating.
1 more element
Dependencies are inferred from the claim text.