US 9,087,677 B2Granted

Methods of electrical signaling in an ion energy analyzer

AssigneeTokyo Electron Limited

InventorsMerritt Funk, Lee Chen, Barton Lane, Jianping Zhao, Radha Sundararajan

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Abstract

A method of generating a signal representing with an ion energy analyzer for use in determining an ion energy distribution of a plasma. The ion energy analyzer, used for determining an ion energy distribution of a plasma, includes a first grid and a second grid that is spaced away from and electrically isolated from the first grid. The first grid forms a first surface of the ion energy analyzer and is positioned to be exposed to the plasma. The first grid includes a first plurality of openings, which are dimensioned to be less than a Debye length for the plasma. A voltage source and an ion current meter are operably coupled to the second grid, the latter of which is configured to measure an ion flux onto the ion collector and to transmit a signal that represents the measured ion flux. The method includes selectively and variably biasing the second grid relative to the first grid.

Claims20

Dependent claims

A method of generating a signal with an ion energy analyzer for use in determining an ion energy distribution of a plasma,

the ion energy analyzer comprising:
a first grid forming a first surface of the ion energy analyzer positioned to be exposed to the plasma at a reference voltage when the ion energy analyzer is positioned in a plasma processing apparatus, the first grid including a first plurality of openings, each of the openings of the first plurality having a dimension that is less than a Debye length for the plasma such that the plasma sheath does not penetrate openings of the first plurality;
an ion collector forming a second surface of the ion energy analyzer;
a first voltage source operably coupled to the ion collector;
a second grid positioned between the first grid and the ion collector and electrically isolated from the first grid;
a second voltage source operably coupled to the second grid;
an ion current meter operably coupled to the second grid;
a first insulator positioned between the first grid and the second grid, wherein a geometry of the first insulator is selected to project, from outside of a respective channel between the first grid and the second grid, inwardly toward and orthogonal to a center axis of the ion energy analyzer such that no straight line path that is parallel to the optic axis exists between any two points on the first grid and the second grid, respectively, from a set of all possible paths extending along a surface of the first insulator;
and
a second insulator positioned between the second grid and the ion collector, wherein a geometry of the second insulator is selected to project, from outside of a respective channel between the second grid and the ion collector, inwardly toward and orthogonal to the center axis of the ion energy analyzer such that no straight line path that is parallel to the optic axis exists between any two points on the second grid and the ion collector grid, respectively, from a set of all possible paths extending along a surface of the second insulator;
the method comprising:
preventing plasma from penetrating the first grid with the first plurality of openings;
selectively and variably biasing the ion collector relative to the first grid with the first voltage source;
selectively and variably biasing the second grid relative to the first grid with the second voltage source;
with the selected geometry of the first insulator, electrically isolating the first grid from the second grid and reducing or preventing electrical breakdown therebetween;
with the selected geometry of the second insulator, electrically isolating the second grid from the ion collector and reducing or preventing electrical breakdown therebetween;
measuring an ion current flow at the ion collector with the ion current meter;
and
transmitting a signal representing the measured ion current flow.

16 more elements

A method of generating a signal with an ion energy analyzer for use in determining an ion energy distribution of a plasma,

the ion energy analyzer comprising:
a first grid forming a first surface of the ion energy analyzer positioned to be exposed to the plasma at a reference voltage when the ion energy analyzer is positioned in a plasma processing apparatus, the first grid including a first plurality of openings, each of the openings of the first plurality having a dimension that is less than a Debye length for the plasma such that the plasma sheath does not penetrate openings of the first plurality;
an ion collector forming a second surface of the ion energy analyzer;
a first voltage source operably coupled to the ion collector;
a second grid positioned between the first grid and the ion collector and electrically isolated from the first grid;
a second voltage source operably coupled to the second grid;
an ion current meter operably coupled to the second grid;
a first insulator positioned between the first grid and the second grid, wherein a geometry of the first insulator is selected to project from outside of a respective channel between the first grid and the second grid diametrically inwardly from the respective channel of the first grid and the second grid a length, L, that is sufficient to reduce electrical breakdown therebetween;
and
a second insulator positioned between the second grid and the ion collector, wherein a geometry of the second insulator is selected to project from outside of a respective channel between the second grid and the ion collector diametrically inwardly from the respective channel of the second grid and the ion collector a length, L, that is sufficient to reduce electrical breakdown therebetween;
the method comprising:
preventing plasma from penetrating the first grid with the openings of the first plurality of openings;
selectively and variably biasing the ion collector relative to the first grid with the first voltage source;
selectively and variably biasing the second grid relative to the first grid with the second voltage source;
with the selected geometry of the first insulator, electrically isolating the first grid from the second grid and reducing or preventing electrical breakdown therebetween;
with the selected geometry of the second insulator, electrically isolating the second grid from the ion collector and reducing or preventing electrical breakdown therebetween;
measuring an ion current flow at the ion collector with the ion current meter;
and
transmitting a signal representing the measured ion current flow.

16 more elements

A method of generating a signal with an ion energy analyzer for use in determining an ion energy distribution of a plasma,

the ion energy analyzer comprising:
a first grid forming a first surface of the ion energy analyzer positioned to be exposed to the plasma at a reference voltage when the ion energy analyzer is positioned in a plasma processing apparatus, the first grid including a first central grid portion having a first plurality of openings therein and a first central channel formed below the first central grid portion, each of the openings of the first plurality having a dimension that is less than a Debye length for the plasma such that the plasma sheath does not penetrate openings of the first plurality, and a diameter of the first central grid portion being less than a diameter of the first central channel;
an ion collector forming a second surface of the ion energy analyzer;
a first voltage source operably coupled to the ion collector;
a second grid positioned between the first grid and the ion collector and electrically isolated from the first grid, the second grid including a second central grid portion having a second plurality of openings therein and a second central channel formed below the second central grid portion, and a diameter of the second central grid portion being less than a diameter of the second central channel;
a second voltage source operably coupled to the second grid;
an ion current meter operably coupled to the second grid;
a first insulator positioned between the first grid and the second grid and having a first central opening in vertical alignment with the first and second central grid portions, wherein an inner diameter of the first insulator is greater than the diameter of the first and second central grid portions and less than the diameter of the first central channel such that the first insulator has an inward projection toward a center of the ion energy analyzer;
and wherein an outer diameter of the first insulator is greater than the diameter of the first central channel;
and
a second insulator positioned between the second grid and the ion collector and having a second central opening in vertical alignment with the first and second central grid portions , wherein an inner diameter of the second insulator is greater than the diameter of the first and second central grid portions and less than the diameter of the second central channel such that the second insulator has an inward projection toward the center of the ion energy analyzer;
and wherein an outer diameter of the second insulator is greater than the diameter of the second central channel;
the method comprising:
preventing plasma from penetrating the first grid with the first plurality of openings;
selectively and variably biasing the ion collector relative to the first grid with the first voltage source;
selectively and variably biasing the second grid relative to the first grid with the second voltage source;
with the inward projection of the first insulator, electrically isolating the first grid from the second grid and reducing or preventing electrical breakdown therebetween;
with the inward projection of the second insulator, electrically isolating the second grid from the ion collector and reducing or preventing electrical breakdown therebetween;
measuring an ion current flow at the ion collector with the ion current meter;
and
transmitting a signal representing the measured ion current flow.

18 more elements

Dependencies are inferred from the claim text.

Facts

Application: 13/433,078Filed 28 Mar 2012 · us provisional application
Priority: 28 Mar 2011
Published: US 2012/0248322 A14 Oct 2012
Granted: 21 Jul 2015
Term ends: Not estimatedThe source records don’t support an estimate.

Classification7 codes

H01J 37/32935
Plasma diagnostics: monitoring and controlling tubes by information coming from the object and/or discharge
H01J 49/488
Using electrostatic analysers, e.g. cylindrical sector, Wien filter: with retarding grids
H05H 1/0081
Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature: by electric means
Y10T 29/49002
Method of mechanical manufacture: electrical device making