MEMS device
AssigneeInfineon Technologies AG
InventorsFlorian Schoen, Mohsin Nawaz, Mihail Sararoiu
Life of this patent
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Abstract
System and method for a microelectromechanical system (MEMS) is disclosed. A preferred embodiment comprises a first anchor region, a vibrating MEMS structure fixed to the first anchor region, a first electrode adjacent the vibrating MEMS structure, a second electrode adjacent the vibrating MEMS structure wherein the vibrating MEMS structure is arranged between the first and the second electrode.
Claims19
A microelectromechanical system (MEMS) comprising:
- an anchor region;
- an electrode connected to the anchor region comprising an outer circumference, a first plurality of openings and a second plurality of openings;
- a first drive or trim electrode surrounding the outer circumference of the electrode;
- and
- a plurality of second drive or trim electrodes located in the first plurality of openings of the electrode.
A method for operating a microelectromechanical system (MEMS) comprising an electrode connected to a first anchor region comprising an outer circumference and a plurality of openings, a first drive or trim electrode surrounding the outer circumference of the electrode and a plurality of second drive or trim electrodes located in the plurality of openings of the electrode, the method comprising:
- applying a first bias voltage to the electrode and the first drive or trim electrode;
- and
- applying a second bias voltage to the second drive or trim electrodes, wherein the second bias voltage is independent from the first bias voltage.
A method for operating a microelectromechanical system (MEMS) comprising a first anchor region, a second anchor region, a plate electrode connected to the first anchor region and the second anchor region, a first electrode located adjacent a first surface of the plate electrode and laterally disposed between the first anchor region and the second anchor region, and a second electrode located adjacent a second surface of the plate electrode and connected to the first anchor region and the second anchor region, the method comprising:
- applying a first bias voltage to the plate electrode of the MEMS and the first electrode;
- and
- applying a second bias voltage to the second electrode, wherein the second bias voltage is independent from the first bias voltage,
- wherein applying the first bias voltage shifts a stiffness of the plate electrode from a first stiffness to a second stiffness, and
- wherein applying the second bias voltage shifts the stiffness from the second stiffness to a third stiffness.
A microelectromechanical system (MEMS) comprising:
- a first anchor region;
- a second anchor region;
- a plate electrode connected to the first anchor region and the second anchor region, wherein the plate electrode is a semiconductive plate electrode;
- a first electrode located adjacent to and spaced apart from a first surface of the plate electrode and laterally disposed between the first anchor region and the second anchor region, wherein the first electrode comprises a plurality of first electrodes;
- and
- a second electrode located adjacent to and spaced apart from a second surface of the plate electrode and connected to the first anchor region and the second anchor region.
Dependencies are inferred from the claim text.