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US 9,081,035 B2Granted
Test probe with integrated test transformer
AssigneeRohde & Schwarz GmbH & Co. KG
InventorsAndrea Deutinger, Gerd Hechtfischer, Christian Evers
Life of this patent
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Abstract
A measuring device used for registering a test signal originating from a circuit structure applied to a wafer. The measuring device provides at least one test probe and at least one test transformer. The at least one test transformer is connected to the at least one test probe in an electrically conductive manner. In this context, the test transformer is arranged on the test probe.
Claims18
A measuring device comprising:
- at least one test probe and at least one test transformer,
- wherein the at least one test transformer is connected in an electrically conductive manner to the at least one test probe,
- wherein the test transformer is disposed on the test probe to form an inseparable test unit,
- a heat sink in the form of a balancing device, which is mechanically connected to a retaining element in a rigid manner,
- a connecting element, which is connected to the test transformer and to the balancing device, wherein the connecting element includes gold or brass,
- wherein the test probe and the test transformer are jointly replaceable by withdrawing from the measuring device, and
- wherein the test transformer is a thermal power sensor.
4 more elements
Dependencies are inferred from the claim text.