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US 9,076,625 B2Granted
Indirectly heated cathode cartridge design
AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorsCraig Chaney, Leo Klos, Anthony Renau, Alexander Perel
Life of this patent
Estimating the term…
Abstract
An apparatus and method for producing electrons in a plasma flood gun is disclosed. The apparatus includes an indirectly heated cathode (IHC) which is contained within a pre-fabricated cartridge. This cartridge can be readily replaced in a plasma flood gun. In addition, the use of an IHC reduces the amount of contaminants that are injected into the workpiece or wafer.
Claims19
A replaceable indirectly heated cathode (IHC) cartridge, comprising:
- a cylinder having a bore therethrough;
- a filament positioned within said bore;
- an extender that is configured to be conductive and is electrically connected to said filament;
- a first insulating support holding said filament in said bore while keeping said filament electrically insulated from said cylinder, wherein said first insulating support defines a plurality of support bores through which said filament extends and wherein said extender is disposed on said first insulating support;
- a holder mechanically attached to said insulating support;
- a cathode press fit into said holder, such that said cathode is positioned over said filament and electrically insulated from said filament and said cylinder, and wherein said holder and said cathode are disposed within said bore;
- a second insulating support, wherein a spacing between said first insulating support and said second insulating support corresponds to a length of said extender;
- and
- two lateral bores in said cylinder and two fasteners, each corresponding to one of said two lateral bores, such that said fasteners are inserted in said lateral bores and retain said first insulating support and said second insulating support at fixed locations within said cylinder.
6 more elements
An ion implantation device, comprising
- an Ion source;
- a magnet analyzer;
- at least one deceleration stage;
- a magnet collimator;
- and
- a plasma flood gun, wherein said plasma flood gun further comprises an indirect heated cathode (IHC) cartridge adapted to generate and emit electrons toward a substrate, wherein said IHC cartridge comprises:
- a cylinder having a bore therethrough;
- a filament positioned within said bore, electrically connected to two contacts extending beyond said cylinder;
- an extender that is configured to be conductive and is electronically connected to said filament;
- a first insulating support holding said filament in said cylinder while keeping said filament electrically insulated from said cylinder, wherein said first insulating support defines a plurality of support bores through which said filament extends and wherein said extender is disposed on said first insulating support;
- a holder mechanically attached to said insulating support;
- a cathode press fit into said holder, such that said cathode is positioned over said filament and electrically insulated from said filament and said cylinder, and wherein said holder and said cathode are disposed within said bore;
- a second insulating support, wherein a spacing between said first insulating support and said second insulating support corresponds to a length of said extender;
- and
- two lateral bores in said cylinder and two fasteners, each corresponding to one of said two lateral bores, such that said fasteners are inserted in said lateral bores and retain said first insulating support and said second insulating support at fixed locations within said cylinder.
12 more elements
A replaceable indirectly heated cathode (IHC) cartridge, comprising:
- a cylinder having a bore therethrough;
- a filament positioned within said bore;
- an extender that is configured to be conductive and is electrically connected to said filament;
- a first insulating support holding said filament in said bore while keeping said filament electrically insulated from said cylinder, wherein said first insulating support defines a plurality of support bores through which said filament extends and wherein said extender is disposed on said first insulating support;
- a holder mechanically attached to said insulating support;
- a cathode press fit into said holder, such that said cathode is positioned over said filament and electrically insulated from said filament and said cylinder, and wherein said holder and said cathode are disposed within said bore;
- and
- a lateral bore in said cylinder, and a fastener corresponding to the lateral bore such that said fastener inserted in said lateral bore retains said first insulating support at a fixed location within said cylinder.
5 more elements
Dependencies are inferred from the claim text.