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US 9,071,222 B2Granted
Method for forming an electrode
AssigneeEpcos AG
InventorsAndreas Link, Gudrun Henn, Rainer Braun
Life of this patent
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Abstract
A microacoustic component includes an active layer and an electrode. The electrode includes a first metal layer facing the active layer, a second metal layer facing away from the active layer, and a third layer arranged between the first metal layer and the second metal layer. The third layer serves as a diffusion barrier.
Claims17
A method for forming a multi-layer electrode for contacting a micro acoustic device comprising:
- providing a substrate;
- applying a first conductive layer of a first alloy-forming metal to a surface of the substrate or a layer lying in between;
- applying a third layer of a non-alloy-forming material to a surface of the first layer, wherein the third layer has a thickness of 2-50 nm and the third layer comprises W, TiN, Al2O3, SiN, SiO2 and/or A-Si;
- applying a second conductive layer of a second alloy-forming metal to a surface of the third layer, wherein the first conductive layer, the third layer and the second conductive layer together form the multi-layer electrode and wherein the third layer serves as a diffusion barrier to prevent diffusion of atoms of the first conductive layer into the second conductive layer and/or diffusion of atoms of the second conductive layer into the first conductive layer, and wherein forming the first conductive layer, the third layer and the second conductive layer comprises forming a part of a micro acoustic component;
- after applying the second conductive layer, applying a fourth conductive layer to the second conductive layer, the fourth conductive layer comprising a material with a high acoustic impedance, wherein an active layer of the micro acoustic device is applied to the fourth conductive layer;
- and
- wherein:
- the first conductive layer comprises a second metal layer, and
- the second conducive layer comprises a first metal layer arranged closer to the active layer than the first conductive layer.
6 more elements
A method for forming a multi-layer electrode comprising:
- providing a substrate;
- applying a first conductive layer of a first alloy-forming metal to a surface of the substrate or a layer lying in between;
- applying a third conductive layer of a non-alloy-forming metal to a surface of the first layer, wherein the third layer has a thickness of 2-50 nm;
- applying a second conductive layer of a second alloy-forming metal to a surface of the third layer, wherein the first conductive layer, the third conductive layer and the second conductive layer are all electrically connected together to form electrode layers of the multi-layer electrode and wherein the third conductive layer serves as a diffusion barrier to prevent diffusion of atoms of the first conductive layer into the second conductive layer and/or diffusion of atoms of the second conductive layer into the first conductive layer, and wherein forming the first conductive layer, the third conductive layer, and the second conductive layer comprises forming a part of a micro acoustic component;
- and
- applying a fourth conductive layer to the second conductive layer, the fourth conductive layer comprising a material with a high acoustic impedance.
3 more elements
Dependencies are inferred from the claim text.