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US 9,070,862 B2Granted
Piezoelectric transducers using micro-dome arrays
AssigneeFUJIFILM Dimatix, Inc.
InventorsAndreas Bibl, Hung-Fai Stephen Law, Kevin Von Essen, Mats G. Ottosson
Life of this patent
Estimating the term…
Abstract
An ultrasonic piezoelectric transducer device includes a transducer array consisting of an array of vibrating elements, and a base to which the array of vibrating elements in the transducer array are attached. The base include integrated electrical interconnects for carrying driving signals and sensed signals between the vibrating elements and an external control circuit. The base can be an ASIC wafer that includes integrated circuitry for controlling the driving and processing the sensed signals. The interconnects and control circuits in the base fit substantially within an area below the array of multiple vibrating elements.
Claims37
A device for generating pressure waves in a medium, comprising:
- a handle portion having a first distal end;
- and
- a vibrating portion attached to the handle portion in proximity to the first distal end of the handle portion, the vibrating portion comprising:
- a plurality of vibrating elements, the plurality of vibrating elements sharing a common reference electrode, each vibrating element comprising a respective drive electrode and a respective piezoelectric element disposed between the respective drive electrode and the common reference electrode;
- and
- a base supporting the plurality of vibrating elements on a first surface of the base and including integrated circuitry electrically connected to the drive electrodes and the common reference electrode of the plurality of vibrating elements,
- wherein each piezoelectric element includes a respective flexible portion and a respective stationary portion connected to the respective flexible portion,
- wherein each piezoelectric element includes a respective curved portion surrounded by a respective planar portion, and wherein the respective planar portion and a peripheral portion of the respective curved portion of the piezoelectric element form the respective stationary portion of the piezoelectric element,
- wherein the flexible portion of each piezoelectric element is suspended over the first surface and is curved in a first direction relative to the first surface of the base in the absence of a driving voltage applied between the respective drive electrode of the vibrating element and the common reference electrode,
- wherein the flexible portion of each piezoelectric element deflects in response to a drive voltage applied between the common reference electrode and the respective drive electrode between which the piezoelectric element is disposed,
- wherein the device has an exposed outer surface facing a direction pointing from the base toward the plurality of vibrating elements, and the exposed outer surface includes respective outer surfaces of the plurality of vibrating elements or an outer surface of a flexible film covering the outer surfaces of the plurality of vibrating elements, and
- wherein the exposed outer surface of the device deflects in conformity with the deflection of the flexible portions of the respective piezoelectric elements of the plurality of vibrating elements.
9 more elements
A device for generating pressure waves in a medium, comprising:
- a handle portion having a first distal end;
- and
- a vibrating portion attached to the handle portion in proximity to the first distal end of the handle portion, the vibrating portion comprising:
- a plurality of vibrating elements, the plurality of vibrating elements sharing a common reference electrode, each vibrating element comprising a respective drive electrode and a respective piezoelectric element disposed between the respective drive electrode and the common reference electrode;
- and
- a base supporting the plurality of vibrating elements on a first surface of the base and including integrated circuitry electrically connected to the drive electrodes and the common reference electrode of the plurality of vibrating elements by vertically extending electrical connections,
- wherein each piezoelectric element includes a respective flexible portion and a respective stationary portion connected to and surrounding the respective flexible portion,
- wherein the flexible portion of each piezoelectric element is suspended over the first surface,
- wherein the flexible portion of each piezoelectric element deflects in response to a drive voltage applied between the common reference electrode and the respective drive electrode between which the piezoelectric element is disposed,
- wherein the device has an exposed outer surface facing a direction pointing from the base toward the plurality of vibrating elements, and the exposed outer surface includes respective outer surfaces of the plurality of vibrating elements or an outer surface of a flexible film covering the outer surfaces of the plurality of vibrating elements, and
- wherein the exposed outer surface of the device deflects in conformity with the deflection of the flexible portions of the respective piezoelectric elements of the plurality of vibrating elements.
8 more elements
A device for generating pressure waves in a medium, comprising:
- a handle portion having a first distal end;
- and
- a vibrating portion attached to the handle portion in proximity to the first distal end of the handle portion, the vibrating portion comprising:
- a plurality of vibrating elements, the plurality of vibrating elements sharing a common reference electrode, each vibrating element comprising a respective drive electrode and a respective piezoelectric element disposed between the respective drive electrode and the common reference electrode;
- and
- a base supporting the plurality of vibrating elements on a first surface of the base and including integrated circuitry electrically connected to the drive electrodes and the common reference electrode of the plurality of vibrating elements,
- wherein each piezoelectric element includes a respective flexible portion and a respective stationary portion connected to the respective flexible portion,
- wherein the flexible portion of each piezoelectric element is suspended over the first surface and is curved in a first direction relative to the first surface of the base in the absence of an applied force that increases mechanical stress on the flexible portion,
- wherein the flexible portion of each piezoelectric element deflects in response to a drive voltage applied between the common reference electrode and the respective drive electrode between which the piezoelectric element is disposed,
- wherein the device has an exposed outer surface facing a direction pointing from the base toward the plurality of vibrating elements, and the exposed outer surface includes respective outer surfaces of the plurality of vibrating elements or an outer surface of a flexible film covering the outer surfaces of the plurality of vibrating elements, and
- wherein the exposed outer surface of the device deflects in conformity with the deflection of the flexible portions of the respective piezoelectric elements of the plurality of vibrating elements.
8 more elements
A device for generating pressure waves in a medium, comprising:
- a handle portion having a first distal end;
- and
- a vibrating portion attached to the handle portion in proximity to the first distal end of the handle portion, the vibrating portion comprising:
- a plurality of vibrating elements, the plurality of vibrating elements sharing a common reference electrode, each vibrating element comprising a respective drive electrode and a respective piezoelectric element disposed between the respective drive electrode and the common reference electrode;
- and
- a base supporting the plurality of vibrating elements on a first surface of the base and including integrated circuitry electrically connected to the drive electrodes and the common reference electrode of the plurality of vibrating elements, the integrated circuitry including a circuit corresponding to each of the plurality of vibrating elements, each circuit connected to the drive electrode of the corresponding vibrating element by a vertically oriented interconnect,
- wherein each piezoelectric element includes a respective flexible portion and a respective stationary portion connected to the respective flexible portion,
- wherein the flexible portion of each piezoelectric element deflects in response to a drive voltage applied between the common reference electrode and the respective drive electrode between which the piezoelectric element is disposed,
- wherein the device has an exposed outer surface facing a direction pointing from the base toward the plurality of vibrating elements, and the exposed outer surface includes respective outer surfaces of the plurality of vibrating elements or an outer surface of a flexible film covering the outer surfaces of the plurality of vibrating elements, and
- wherein the exposed outer surface of the device deflects in conformity with the deflection of the flexible portions of the respective piezoelectric elements of the plurality of vibrating elements.
7 more elements
Dependencies are inferred from the claim text.