Method of manufacturing a light emitting diode
AssigneeSeren Photonics Limited
InventorTao Wang
Life of this patent
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Abstract
A method (100) of making a semiconductor device, for example a light emitting diode. The method (100) includes providing (105) a semiconductor wafer, and providing (110) a protective layer over the semiconductor wafer. Preferably the protective layer comprises indium-tin oxide. Processing steps are performed on the wafer and the protective layer is arranged to protect the wafer during the processing steps. The processing steps may include forming a mask layer (115) over the protective layer, which is used for etching through the protective layer and into the semiconductor wafer, removing the mask layer, or etching filling materials (150) provided over the selectively etched semiconductor wafer.
Claims14
A method of making a light emitting diode comprising the steps:
- (i) providing a semiconductor wafer comprising a plurality of layers including a light emitting layer;
- (ii) providing a protective layer over the semiconductor wafer, the protective layer comprising at least one of indium-tin oxide, zinc oxide and titanium oxide;
- (iii) providing a mask layer over the protective layer, the mask layer comprising at least one of silicon dioxide and a silicon nitride layer;
- (iv) performing etching steps on the wafer to form the light emitting diode;
- wherein the protective layer is arranged to protect the semiconductor wafer during at least one of the etching steps.
A method of making a light emitting diode comprising the steps:
- (i) providing a semiconductor wafer comprising a plurality of layers including a light emitting layer;
- (ii) providing a protective layer over the semiconductor wafer;
- (iii) performing processing steps on the wafer to form the light emitting diode;
- wherein the protective layer is arranged to protect the semiconductor wafer during at least one of the processing steps, and wherein the protective layer is no more than 50 nanometers thick.
Dependencies are inferred from the claim text.