Integrated circuit with a thin body field effect transistor and capacitor
AssigneeInternational Business Machines Corporation
InventorsKangguo Cheng, Bruce Doris, Ali Khakifirooz, Ghavam G. Shahidi
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AssigneeInternational Business Machines Corporation
InventorsKangguo Cheng, Bruce Doris, Ali Khakifirooz, Ghavam G. Shahidi
Estimating the term…
An circuit supporting substrate includes a transistor and a capacitor. The transistor includes a first semiconductor layer and a gate stack located on the first semiconductor layer. The gate stack includes a metal layer and a first high-k dielectric layer. A gate spacer is located on sidewalls of the gate stack. The first high-k dielectric layer is located between the first semiconductor layer and the metal layer and between the gate spacer and sidewalls of the metal layer. A first silicide region is located on a first source/drain region. A second silicide region is located on a second source/drain region. The capacitor includes a first terminal that comprises a third silicide region located on a portion of the second semiconductor. A second high-k dielectric layer is located on the silicide region. A second terminal comprises a metal layer that is located on the second high-k dielectric layer.
A circuit supporting substrate comprising:
Dependencies are inferred from the claim text.