Semiconductor device and method of manufacturing the same

A semiconductor device comprising, in cross section:

• a semiconductor substrate with an n-type transistor forming region and a p-type transistor forming region;
• an n-type transistor in the n-type transistor forming region of the semiconductor substrate, the n-type transistor having (a) a first gate insulating film on the semiconductor substrate, the first gate insulating film having a first trench therein but not extending therethrough (b) a first gate electrode on the semiconductor substrate within the first trench with at least a portion of the first gate insulating film between the first gate electrode and the semiconductor substrate, the first gate electrode made of a metal material and in direct contact with the first gate insulating film, (c) a first side wall film at opposite sides of the first gate electrode and adjacent the first gate insulting film, (d) a first stress applying film having a tensile stress at the opposite sides of the first gate electrode and adjacent the first side wall insulating film and over the semiconductor substrate, (e) first silicide layers at a top surface of the semiconductor substrate and at the opposite sides of the first gate electrode, the first silicide layers not extending under the first sidewall insulating film (f) first source/drain regions in the semiconductor substrate at the both sides of the first gate electrode, each first source/drain region not extending under the first side wall insulating film, and (g) first source/drain extension regions extending from respective ends of the first silicide regions to beneath the first gate insulating film;
• and
• a p-type transistor in the n-type transistor forming region of the semiconductor substrate, the p-type transistor, the p-type transistor having (a) a second gate insulating film on the semiconductor substrate, the second gate insulating film having a second trench therein but not extending therethrough, (b) a second gate electrode within the second trench with at least a portion of the second gate insulating film between the second gate electrode and the semiconductor substrate, (c) a second side wall film at opposite sides of the second gate electrode and adjacent the second gate insulting film, (d) a second stress applying film having a compressive stress at the opposite sides of the second gate electrode and adjacent the second side wall insulating film and over the semiconductor substrate, (e) second silicide regions at the top surface of the semiconductor substrate at the opposite sides of the second gate electrode, each second silicide region not extending under the second side wall insulating film, (f) second source/drain regions in the semiconductor substrate at both sides of the second gate electrode, each second source/drain region not extending under the second side wall insulating film, and (g) second source/drain regions extending from respective ends of the second silicide regions to beneath the second gate insulating film,
• wherein,
• the first silicide regions are between the first source/drain regions and the first stress applying layer but do not extend beneath the first sidewall insulating film,
• the second silicide regions are between the second source/drain regions and the second stress applying layer but do not extend beneath the second side wall insulating film,
• the first side wall insulating film is between the first gate insulating film and the first stress applying film and in direct contact with both of them, and
• the second side wall insulating film is between the second gate insulating film and the second stress applying film and in direct contact with both of them.

A method of manufacturing a semiconductor device, comprising, as viewed in cross section:

• forming a dummy gate on a semiconductor substrate;
• then forming source/drain extension regions at opposite sides of the dummy gate electrode;
• then forming source/drain regions at the opposite sides of the dummy gate electrode;
• then forming silicide regions at a top surface of the semiconductor substrate at the opposite sides of the dummy gate;
• then forming a side wall insulating film on each side wall of the dummy gate;
• then forming a stress applying film along the side wall insulating film at the opposite sides of the dummy gate electrode and over the semiconductor substrate;
• then forming a trench in the sidewall insulating film by removing the dummy gate;
• then forming a gate insulating film along side portions and a bottom portion of the trench;
• and
• then forming a gate electrode made of a metal material on the semiconductor substrate within the trench with the bottom portion of the gate insulating film therebetween, the gate electrode being in direct contact with at least one of the side portions and the bottom portion of the gate insulating film,
• wherein,
• the gate electrode is in direct contact with the gate insulating film,
• the side wall insulating film is at opposite sides of the gate electrode and is adjacent the gate insulating layer,
• the stress applying film is at the opposite sides of the gate electrode and over at least a portion of the semiconductor substrate and adjacent the side wall insulating film,
• the silicide regions are between the source/drain regions and the stress applying layer;
• the side wall insulating film is between the gate insulating film and the stress applying film and in direct contact with both of them,
• each silicide region does not extend under the side wall insulating film,
• each source/drain region does not extend under the sidewall insulating film, and
• each source/drain extension region extends from a respective silicide region to under the gate insulating film.

A method of manufacturing a semiconductor device, comprising:

• forming a first dummy gate in an n-type transistor forming region of a semiconductor substrate;
• forming a second dummy gate in a p-type transistor forming region of the semiconductor substrate;
• forming first source/drain extension regions at opposite sides of the first dummy gate electrode;
• forming second source/drain extension regions at opposite sides of the second dummy gate electrode;
• forming first source/drain regions at the opposite sides of the first dummy gate electrode;
• forming second source/drain regions at the opposite sides of the second dummy gate electrode;
• forming first silicide regions at a top surface of the semiconductor substrate at the opposite sides of the first dummy gate;
• forming second silicide regions at the top surface of the semiconductor substrate at the opposite sides of the second dummy gate;
• forming first and second side wall insulating films on side walls of the first and second dummy gates, respectively;
• forming a first stress applying film along the first side wall insulating film at the opposite sides of the first dummy gate electrode and over the semiconductor substrate in the n-type transistor forming region;
• forming a second stress applying film along the second side wall insulating film at the opposite sides of the second dummy gate electrode and over the semiconductor substrate in the n-type transistor forming region;
• forming first and second trenches by removing the first and second dummy gates, respectively;
• forming a first gate insulating film along a side portion and a bottom portion of the first trench;
• forming a second gate insulating film along a side portion and a bottom portion of the second trench;
• and
• forming first and second gate electrodes on the semiconductor substrate within the first and second trenches, respectively, each with a portion of its respective gate insulating film therebetween, the first and second gate electrodes being made of a metal material and being in direct contact with the portion of its respective gate insulating film,
• wherein,
• the first gate electrode is in direct contact with the first gate insulating film,
• the first side wall insulating film is at opposite sides of the first gate electrode and is adjacent the first gate insulating layer,
• the first stress applying film is at the opposite sides of the first gate electrode and over at least a portion of the semiconductor substrate and adjacent the first side wall insulating film,
• the first silicide regions are between the first source/drain regions and the first stress applying layer,
• each first silicide region does not extend under the first side wall insulating film,
• each first source/drain region does not extend under the first sidewall insulating film,
• each first source/drain extension region extends from a respective first silicide region to under the first gate insulating film,
• the first side wall insulating film is between the first gate insulating film and the first stress applying film and in direct contact with both of them,
• the second gate electrode is in direct contact with the second gate insulating film,
• the second side wall insulating film is at opposite sides of the second gate electrode and is adjacent the second gate insulating layer,
• the second stress applying film is at the opposite sides of the second gate electrode and over at least a portion of the semiconductor substrate and adjacent the second side wall insulating film,
• the second silicide regions are between the second source/drain regions and the second stress applying layer,
• each second silicide region does not extend under the second side wall insulating film,
• each second source/drain region does not extend under the second sidewall insulating film,
• each second source/drain extension region extends from a respective second silicide region to under the second gate insulating film, and
• the second side wall insulating film is between the second gate insulating film and the second stress applying film and in direct contact with both of them.

A method of manufacturing a semiconductor device, comprising, in cross section:

• forming a first dummy gate in an n-type transistor forming region of a semiconductor substrate;
• forming a second dummy gate in a p-type transistor forming region of the semiconductor substrate;
• forming first source/drain extension regions at opposite sides of the first dummy gate electrode;
• forming second source/drain extension regions at opposite sides of the second dummy gate electrode;
• forming first source/drain regions at the opposite sides of the first dummy gate electrode;
• forming second source/drain regions at the opposite sides of the second dummy gate electrode;
• forming first silicide regions at a top surface of the semiconductor substrate at the opposite sides of the first dummy gate;
• forming second silicide regions at the top surface of the semiconductor substrate at the opposite sides of the second dummy gate;
• forming first and second side wall insulating films on side walls of the first and second dummy gates, respectively;
• forming a first stress applying film along the first side wall insulating film at the opposite sides of the first dummy gate electrode and over the semiconductor substrate in the n-type transistor forming region;
• forming a second stress applying film along the second side wall insulating film at the opposite sides of the second dummy gate electrode and over the semiconductor substrate in the n-type transistor forming region;
• forming first and second trenches in the first and second side wall insulating films by removing the first and second dummy gates, respectively;
• forming a first gate insulating film along a side portion and a bottom portion of the first trench;
• forming a second gate insulating film along a side portion and a bottom portion of the second trench;
• and
• forming first and second gate electrodes on the semiconductor substrate within the first and second trenches, respectively, each with a portion of its respective gate insulating film therebetween, the first and second gate electrodes being made of a metal material and being in direct contact with the portion of its respective gate insulating film,
• wherein,
• the first gate electrode is in direct contact with the first gate insulating film,
• the first side wall insulating film is at opposite sides of the first gate electrode and is adjacent the first gate insulating layer,
• the first stress applying film is at the opposite sides of the first gate electrode and over at least a portion of the semiconductor substrate and adjacent the first side wall insulating film,
• the first silicide regions are between the first source/drain regions and the first stress applying layer,
• each first silicide region does not extend under the first side wall insulating film,
• each first source/drain region does not extend under the first sidewall insulating film,
• each first source/drain extension region extends from a respective first silicide region to under the first gate insulating film,
• the second gate electrode is in direct contact with the second gate insulating film,
• the second side wall insulating film is at opposite sides of the second gate electrode and is adjacent the second gate insulating layer,
• the second stress applying film is at the opposite sides of the second gate electrode and over at least a portion of the semiconductor substrate and adjacent the second side wall insulating film,
• the second silicide regions are between the second source/drain regions and the second stress applying layer,
• each second silicide region does not extend under the second side wall insulating film,
• each second source/drain region does not extend under the second sidewall insulating film,
• each second source/drain extension region extends from a respective second silicide region to under the second gate insulating film,
• after the gate electrodes are formed, a third stress applying film is formed on the n-type transistor, or on the n-type transistor and p-type transistor,
• the first side wall insulating film is between the first gate insulating film and the first stress applying film and in direct contact with both of them, and
• the second side wall insulating film is between the second gate insulating film and the second stress applying film and in direct contact with both of them.

A method of manufacturing a semiconductor device, comprising:

• forming a first dummy gate in an n-type transistor forming region of a semiconductor substrate;
• forming a second dummy gate in a p-type transistor forming region of the semiconductor substrate;
• forming first source/drain extension regions at opposite sides of the first dummy gate electrode;
• forming second source/drain extension regions at opposite sides of the second dummy gate electrode;
• forming first source/drain regions at the opposite sides of the first dummy gate electrode;
• forming second source/drain regions at the opposite sides of the second dummy gate electrode;
• forming first silicide regions at a top surface of the semiconductor substrate at the opposite sides of the first dummy gate;
• forming second silicide regions at the top surface of the semiconductor substrate at the opposite sides of the second dummy gate;
• forming first and second side wall insulating films on side walls of the first and second dummy gates, respectively;
• forming first and second source/drain regions in the semiconductor substrate on the both sides of the first and second dummy gates, respectively;
• forming a first stress applying film along the first side wall insulating film at the opposite sides of the first dummy gate electrode and over the semiconductor substrate in the n-type transistor forming region;
• forming a second stress applying film along the second side wall insulating film at the opposite sides of the second dummy gate electrode and over the semiconductor substrate in the n-type transistor forming region;
• forming first and second trenches in the first and second side wall insulating films by removing the first and second dummy gates, respectively;
• forming a first gate insulating film along a side portion and a bottom portion of the first trench;
• forming a second gate insulating film along a side portion and a bottom portion of the second trench;
• and
• forming first and second gate electrodes on the semiconductor substrate within the first and second trenches, respectively, each with a portion of its respective gate insulating film therebetween, the first and second gate electrodes being made of a metal material and being in contact with the portion of its respective gate insulating film,
• wherein,
• source/drain regions of the p-type transistor include stress applying sources,
• the first gate electrode is in direct contact with the first gate insulating film,
• the first side wall insulating film is at opposite sides of the first gate electrode and is adjacent the first gate insulating layer,
• the first stress applying film is at the opposite sides of the first gate electrode and over at least a portion of the semiconductor substrate and adjacent the first side wall insulating film,
• the first silicide regions are between the first source/drain regions and the first stress applying layer,
• each first silicide region does not extend under the first side wall insulating film,
• each first source/drain region does not extend under the first sidewall insulating film,
• each first source/drain extension region extends from a respective first silicide region to under the first gate insulating film, the first side wall insulating film is between the first gate insulating film and the first stress applying film and in direct contact with both of them,
• the second gate electrode is in direct contact with the second gate insulating film,
• the second side wall insulating film is at opposite sides of the second gate electrode and is adjacent the second gate insulating layer,
• the second stress applying film is at the opposite sides of the second gate electrode and over at least a portion of the semiconductor substrate and adjacent the second side wall insulating film,
• the second silicide regions are between the second source/drain regions and the second stress applying layer,
• each second silicide region does not extend under the second side wall insulating film,
• each second source/drain region does not extend under the second sidewall insulating film,
• each second source/drain extension region extends from a respective second silicide region to under the second gate insulating film, and
• the second side wall insulating film is between the second gate insulating film and the second stress applying film and in direct contact with both of them.