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US 9,070,781 B2Granted
Nonvolatile memory device and method for fabricating the same
AssigneeSK hynix Inc.
InventorSung-Kun Park
Life of this patent
Estimating the term…
Abstract
A nonvolatile memory device includes a floating gate formed over a substrate; a contact plug formed on a first side of the floating gate and disposed parallel to the floating gate with a gap defined therebetween; and a spacer formed on a sidewall of the floating gate and filling the gap, wherein the contact plug and the floating gate have a sufficiently large overlapping area to enable the contact plug to operate as a control gate for the floating gate.
Claims20
A nonvolatile memory device comprising:
- a floating gate formed over a substrate;
- a contact plug formed on a first side of the floating gate and disposed parallel to the floating gate with a gap defined therebetween;
- and
- a spacer formed on a sidewall of the floating gate and filling the gap,
- wherein the contact plug and the floating gate have a sufficiently large overlapping area to enable the contact plug to operate as a control gate for the floating gate.
2 more elements
A nonvolatile memory device comprising:
- a floating gate formed over a substrate;
- a spacer formed on a sidewall of the floating gate;
- a first contact plug formed on a first side of the floating gate and contacting the spacer, the first contact plug being spaced apart from the floating gate by a first distance;
- and
- a second contact plug formed on a second side of the floating gate opposite to the first side, the second contact plug being spaced apart from the floating gate by a second distance
- wherein the first distance is less than the second distance, and
- wherein the first contact plug and the floating gate have a sufficiently large overlapping area and the first distance is sufficiently small to enable the first contact plug to operate as a control gate for the floating gate.
4 more elements
A nonvolatile memory device comprising:
- a select gate formed over a substrate;
- a floating gate formed over the substrate and adjoining the select gate;
- a spacer formed on sidewalls of the floating gate and the select gate;
- and
- a contact plug contacting a portion of the spacer adjacent to the floating gate;
- wherein the contact plug and the floating gate have a sufficiently lame overlapping area to enable the contact plug to operate as a control gate for the floating gate.
3 more elements
Dependencies are inferred from the claim text.