Semiconductor device channels
AssigneeInternational Business Machines Corporation
InventorsDavid H. Allen, Douglas M Dewanz, David P. Paulsen, John E. Sheets, II, Kelly L. Williams
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AssigneeInternational Business Machines Corporation
InventorsDavid H. Allen, Douglas M Dewanz, David P. Paulsen, John E. Sheets, II, Kelly L. Williams
Estimating the term…
A semiconductor device and a method of manufacture are provided. The semiconductor device includes one or more layers having channels adapted to carry signals or deliver power. The semiconductor device may include at least two channels having a substantially equivalent cross-sectional area. Conductors in separate channels may have different cross-sectional areas. A spacer dielectric on a side of a channel may be included. The method of manufacture includes establishing a signal conductor layer including a first channel and a second channel having a substantially equivalent cross-sectional area, introducing a spacer dielectric on a side of the second channel, introducing a first conductor in the first channel having a first cross-sectional area, and introducing a second conductor in the second channel having a second cross-sectional area where the second cross-sectional area is smaller than the first cross-sectional area.
A method of manufacturing a semiconductor device, comprising:
A method of manufacturing a semiconductor device, comprising:
A method of manufacturing a semiconductor device, comprising:
Dependencies are inferred from the claim text.