Methods and systems for forming semiconductor laminate structures
AssigneeLam Research Corporation
InventorJohn F. Stumpf
Life of this patent
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AssigneeLam Research Corporation
InventorJohn F. Stumpf
Estimating the term…
In one embodiment, a method for forming a direct fusion bond between fractional components of a semiconductor laminate structure can include generating one or more direct bonding surfaces on each of a plurality of semiconductor wafers. A first fractional component and a second fractional component can be cut from at least one of the plurality of semiconductor wafers. A second direct bonding surface of the second fractional component can be placed into contact with a first direct bonding surface of the first fractional component to define an initial contact area. An angle of approach between the second direct bonding surface of the second fractional component and the first direct bonding surface of the first fractional component can be closed to create a direct fusion bond of a semiconductor laminate structure. The direct fusion bond can be larger than the initial contact area.
A method for forming a direct fusion bond between fractional components of a semiconductor laminate structure, the method comprising:
Dependencies are inferred from the claim text.