Peripheral electrical connection of package on package
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChing-Wen Hsiao, Chih-Wei Lin, Wei Sen Chang, Yen-Chang Hu, Kuo Lung Pan, Yu-Chih Huang
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChing-Wen Hsiao, Chih-Wei Lin, Wei Sen Chang, Yen-Chang Hu, Kuo Lung Pan, Yu-Chih Huang
Estimating the term…
Various embodiments of mechanisms for forming a die package using through sidewall vias (TsVs), which are formed by sawing through substrate via (TSV) in half, at edges of dies described enable various semiconductor dies and passive components be electrically connected to achieve targeted electrical performance. Redistribution structures with redistribution layers (RDLs) are used along with the TsVs to enable the electrical connections. Since the TsVs are away from the device regions, the device regions do not suffer from the stress caused by the TSV formation. In addition, electrical connections between upper and lower dies by the TsVs increases the efficiency of the area utilization of the die package.
A semiconductor die package, comprising:
A semiconductor die package, comprising:
A semiconductor die package, comprising:
Dependencies are inferred from the claim text.