Back to results
US 9,070,651 B2Granted
Non-linear kerf monitor and design structure thereof
AssigneeInternational Business Machines Corporation
InventorsAlan B. Botula, Alvin J. Joseph, Randy L. Wolf
Life of this patent
Estimating the term…
Abstract
A non-linear kerf monitor, methods of manufacture and design structures are provided. The structure includes a coplanar waveguide provided in a kerf of a wafer between a first chip and a second chip. The structure further includes a shunt switch and a series switch coupled to the coplanar waveguide.
Claims20
An integrated circuit having a structure comprising:
- a coplanar waveguide provided in a kerf of a wafer between a first chip and a second chip;
- and
- a shunt switch and a series switch coupled to the coplanar waveguide.
A method comprising:
- applying a gate bias to a shunt switch and a series switch, both coupled to a coplanar waveguide within a kerf space of a wafer;
- injecting an RF power into one end of the shunt switch and one end of the series switch;
- and
- measuring a fundamental power and a harmonic power at a load resistor of the shunt switch and a second load resistor of the series switch, while increasing the RF power.
1 more element
A design structure tangibly embodied in a non-transitory machine readable storage medium for causing a machine to design, manufacture, or test an integrated circuit, the design structure comprising:
- a coplanar waveguide provided in a kerf of a wafer between a first chip and a second chip;
- and
- a shunt switch and a series switch coupled to the coplanar waveguide.
Dependencies are inferred from the claim text.